Used TEGAL Plasmod for sale

Manufacturer
TEGAL
Model
Plasmod
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TEGAL Plasmod #133169

TEGAL

Plasmod

Etcher, 115 VAC 13.56 MHz RF generator Manual tuning Pyrex chamber Gas input Inner chamber diameter
3
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TEGAL Plasmod #9186244

TEGAL

Plasmod

Etcher 5" x 6" deep quartz chamber.
3
TEGAL Plasmod #9186245

TEGAL

Plasmod

Etcher 5" x 6" deep quartz chamber.
4