Used TEL / TOKYO ELECTRON Telius SCCM #293645275 for sale

TEL / TOKYO ELECTRON Telius SCCM is a multi-platform etcher/asher designed to provide excellent throughput performance for a wide varaiety of etching processes. These processes include but are not limited to semiconductor device manufacture, thin film deposition (TFD), dielectric etching and MEMS etching. TEL Telius SCCM uses a unique patented design to produce a perfectly uniform chamber distribution by utilizing a SCSI-card-based main controller and chamber positioning equipment. This ensures that chamber temperatures and gas flow rates can be maintained in a regulated manner, allowing for high precision etching. TOKYO ELECTRON Telius SCCM has an extensive range of capabilities, making it a great choice for both routine and complex etching tasks. It offers a high degree of flexibility when it comes to substrate handling, with precision rails that allow for multiple substrates of various dimensions to be loaded into the system at once. The multi-zone heat-zone technology and advanced Pyromicron heating elements guarantee consistent, repeatable etching results on different substrates. The chamber design of Telius SCCM is further optimized for maximum throughput and recovery times. It features remote access for remote diagnosis and maintenance tasks, making optimization possible even when the chamber is not physically accessible. Also, it comes with a SIAS, a Sirius Interpreter Algorithm Unit that allows the machine to detect and quickly regulate possible over-etching or under-etching issues, ensuring reliable process control. Combined, these features allow users of TEL / TOKYO ELECTRON Telius SCCM to enjoy world-class etching performance and excellent precision, giving them the ability to achieve product yields and reliability of output quickly. This is why TEL Telius SCCM is the preferred device of many in the semiconductor device manufacturing sector.