Used TEL / TOKYO ELECTRON Telius SCCM for sale

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TEL / TOKYO ELECTRON Telius SCCM #9230233

TEL / TOKYO ELECTRON

Telius SCCM

System, 12" (3) Chambers Missing parts Spare parts: HPK1021-TE2 (3) AGA-50D (3) DGP-120A2 (3) PS3 R
276
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TEL / TOKYO ELECTRON Telius SCCM #293645275

TEL / TOKYO ELECTRON

Telius SCCM

Etcher SiO2 (3) Chambers Gas used: CF4, CHF3, C4F8, O2, Ar Missing parts: (3) Chillers (3) HV Power
86
TEL / TOKYO ELECTRON Telius SCCM #9281489

TEL / TOKYO ELECTRON

Telius SCCM

Etcher.
92
TEL / TOKYO ELECTRON Telius SCCM #9249074

TEL / TOKYO ELECTRON

Telius SCCM

Etcher, 12".
106