Used TEL / TOKYO ELECTRON Telius SCCM #9249074 for sale

TEL / TOKYO ELECTRON Telius SCCM is an advanced etch/ash etching solution designed to provide the industry with an unprecedented level of process control for etching of integrated circuit structures. The equipment is powered by a powerful 3-axis motion system and is equipped with state-of-the-art wafers and flat-panel displays. The unit has an onboard monitoring and control module, capable of precisely monitoring and controlling the speed, pressure, and gas flow of each etch/ash etching process. With an intuitive, user-friendly interface, TEL Telius SCCM allows for the precise process setup and control including the capability of adjusting the recipe parameters for each etching run. The machine is also capable of automatically calibrating itself to ensure optimal process performance and offers recipes and etching parameter sets to simplify the user's etching process tasks. Moreover, the tool can store up to 99 recipes, allowing for multiple recipes of the same structure to be run simultaneously. TOKYO ELECTRON Telius SCCM is designed with an embedded high-pressure safety asset and a dedicated inert gas cylinder to ensure optimum process safety. The model also features a dedicated and separate PCB for power management which ensures high accuracy in controlling each etch/ash process. In addition, the equipment features a durable and durable etch/ash chamber which is also designed to maximize process gas utilization, thereby reducing cost during prolonged process operations. The system has a fully integrated digital vision unit which is perfect for continually controlling large process areas, thereby providing an excellent field of view for the user. It also offers an optional PC-based controller, which allows for additional real-time control of wafer positioning and etching data data collection through the local network. Overall, Telius SCCM is a leading etch/ash etching solution which is designed to take industrial etching process to the next level of precision and control. With its powerful 3-axis motion machine, intuitive user-friendly interface, and optional PC-based controller, the SCCM is a well-suited etcher/asher for integrated circuit manufacturers everywhere.