Used TEL / TOKYO ELECTRON Telius SCCM #9281489 for sale

TEL / TOKYO ELECTRON Telius SCCM is an etcher / asher equipment designed for semiconductor device processing. It incorporates a plasma source, a multiple stage vacuum process chamber, and a process control system with a built-in multiple-step process monitor. The unit produces a high-quality etch or asher process for a wide range of materials and processes, providing excellent productivity and yield. TEL Telius SCCM etcher / asher is designed to operate in the sub-micron to nano-meter range, with excellent uniformity, repeatability and accuracy. In order to efficiently perform etching and ashering, the machine utilizes a variety of technologies such as plasma control systems, high-precision sensors, and high-speed scanning systems. Plasma source control allows the user to precisely set and maintain an optimal etch or asher cylinder profile. High-precision sensors are used to monitor process conditions in real time and provide feedback to enhance processing accuracy and precision. High-speed scanning systems enable high-resolution process control by rapidly measuring the etched or ashed width/depth. The tool offers a user-friendly software interface that gives the user access to all necessary control functions. The intuitive user interface makes creating an etch or asher recipe easy by providing direct access to all necessary parameters. The user can easily select a recipe from a set of pre-programmed recipes, or easily create a custom recipe for the desired application. The asset's multiple stage vacuum process chamber provides a sealed environment that allows for a consistent, repeatable process without the need for frequent maintenance or cleaning. The automatic wafer transfer model ensures accurate loading and unloading of the wafer for efficient process repeatability. TOKYO ELECTRON Telius SCCM is a high performance etcher / asher with excellent interfacing capabilities and process control capabilities. The equipment is designed to provide superior performance at a lower cost of ownership, while offering robust reliability and reproducibility.