Used TEL / TOKYO ELECTRON Telius SCCM #9230233 for sale
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ID: 9230233
Wafer Size: 12"
Vintage: 2005
System, 12"
(3) Chambers
Missing parts
Spare parts:
HPK1021-TE2
(3) AGA-50D
(3) DGP-120A2
(3) PS3 RF Pump boxes
2005 vintage.
TEL / TOKYO ELECTRON Telius SCCM etcher / asher is a single wafer-level solution designed for semiconductor related processes - such as memory cell formation, SOT memory cell alignment, and general semiconductor process applications. This device provides efficient and reliable etching processes with small footprints for small scale and large-scale production requirements. It features advanced etching tools, process monitoring systems, and advanced process recipes combinations for high-speed throughput and high-definition results. The device is designed for wafer leveling to easily align the wafer edge and provide outstanding repeatability. Its innovative metrology monitor measures the etching process on each wafer, verifying the accuracy of the etching operation and assisting with process control. Additionally, real-time error-avoidance capabilities are available to enable process optimization for the highest productivity and yield. Innovative process automation tools integrated in TEL Telius SCCM simplify the recipe download process and allow operators to quickly and easily configure etching operations for high productivity and yield. Advanced process control and monitoring features enable users to adjust technical parameters based on particular etching requirements. Furthermore, TOKYO ELECTRON Telius SCCM provides an intuitive graphic user interface for convenient and easy operation. The system also incorporates high-performance cassette-based load modules, providing a reliable, high-throughput environment. Its compact, cost-effective design enables integration of etching operations in a variety of wafer production lines. This etching system enables manufacturers of semiconductor products to cost-effectively increase their throughput and reduce downtime. Telius SCCM's advanced safety systems monitor and control the environment, eliminating potential safety risks. Additionally, it provides operators with data logging and archiving features to enhance process tracking and aid with regulatory compliance. Its monitoring systems are also designed to integrate with a management information system for complete tracking and quality assurance. Overall, TEL / TOKYO ELECTRON Telius SCCM etcher / asher is an efficient and reliable device for semiconductor related processes, providing users with enhanced productivity and a competitive edge in today's cost-sensitive markets.
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