Used TEL / TOKYO ELECTRON Telius SCCM #293830627 for sale

TEL / TOKYO ELECTRON Telius SCCM is an etcher/asher that has been designed to meet the stringent requirements of semiconductor production. It features a variety of advanced features and specifications, making it one of the most reliable etching tools for both research and production applications. TEL Telius SCCM etcher/asher is designed for chemical-mechanical polishing (CMP) and chemical mechanical planarization (CMP). This etcher/asher is composed of three basic components: the chamber, which includes the process pod, vacuum equipment, and controller system; the process deck, which contains the RF generator, distribution assembly, and process head; and the process pod, which contains the wafer holder, processing head, and substrate elevator. The chamber of TOKYO ELECTRON Telius SCCM is also equipped with a number of advanced features, including precision temperature control, vacuum sensing, and remote operation. The variable temperature range allows for repeatable and reliable process optimization. The chamber is also equipped with a high-resolution sensor to monitor the process in real time and make any necessary adjustments. The process deck of Telius SCCM is powered by a three-phase, high-voltage, RF generator and equipped with a distribution assembly to provide a uniform process across the entire wafer. The process head is a multi-station unit which is capable of processing up to 6 wafers at once. It features a precision positioning unit and a precise air blowing machine to ensure consistent and uniform results. The substrate elevator is designed to facilitate wafer loading, transferring, and unloading. The process chamber in this etcher/asher is also equipped with an automated wafer transfer tool, which is designed to reduce the risk of contamination and improve process throughput. In addition to allowing the wafer to travel between different processes, the transfer asset can be used to load and unload materials from the chamber. The chamber is also equipped with a self-cleaning feature, which helps ensure the chamber is free from contamination. TEL / TOKYO ELECTRON Telius SCCM etcher/asher also offers a number of advanced process monitoring and control features. It includes an embedded target image analysis feature which can be used to detect abnormal process conditions. A sequence editor enables users to define special parameters and process sequences, allowing for greater control over etching and planarizing processes. Overall, TEL Telius SCCM etcher/asher is an excellent choice for semiconductor production and research applications. It offers a wide variety of features and specifications designed to meet the most demanding etching requirements and deliver consistent results and reliable performance.