Used TEL / TOKYO ELECTRON Unity IIe 855DS #197628 for sale

TEL / TOKYO ELECTRON Unity IIe 855DS is a high-end etcher / asher for semiconductor fabrication. It is designed to provide precision etching and ashing processes for the fabrication of semiconductor components, such as interconnect layers, through-silicon vias (TSVs), and MEMS devices. TEL Unity IIe 855DS features a highly precise two-axes cassette-to-cassette transfer equipment and an advanced control system. This enables the etcher / asher to deliver precise and stable etching and ashing processes, with improved uniformity and controllability. The processing chamber is enhanced at higher temperatures compared to standard etcher / ashers, which allows it to reach higher etch rates. TOKYO ELECTRON Unity IIe 855DS also includes unique advanced features, such as versatile gas flow control, advanced process recipes, closed-loop, self-checking protection, auto-abortions, and an advanced end-of-run detection. This ensures a high level of process efficiency, improved quality control, and a reliable etching and ashing experience. Unity IIe 855DS has been designed to process a variety of wafer sizes, up to 8 inch. It is capable of running up to 600 wafers per hour, and ensures short cycle times. This makes the etcher / asher suitable for a wide range of semiconductor production needs. It utilizes advanced process technologies, such as OPC-RI/RIE, strip ashing, etch-stop-etch, and annealing, among others. As for safety and environmental features, TEL / TOKYO ELECTRON Unity IIe 855DS is constructed with certified, ultra-low-leak valves. This ensures an extremely tight seal, and helps to prevent any gas from leaking into the surrounding environment. Additionally, the etcher / asher uses a variety of process gases with low toxicity, and has an integrated safety unit designed to monitor levels of hazardous gases. At a total machine height of just 70 cm, TEL Unity IIe 855DS is compact, making it suitable for a wide range of industry spaces. It is also a highly efficient tool, which ensures lower operating costs. In short, TOKYO ELECTRON Unity IIe 855DS is a precise and efficient etcher / asher for semiconductor fabrication, providing process sophistication, quality control, and reliability. It is known for its high performance, as well as for its environmental safety and low operating costs.