Used TEL / TOKYO ELECTRON Unity IIe 855DS for sale

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TEL / TOKYO ELECTRON Unity IIe 855DS #293820513

TEL / TOKYO ELECTRON

Unity IIe 855DS

Oxide etcher, 8" (26) Slots SCCM DHhard Chambers Process: C5F8, Ar, O2, CHF3, CF4 Voltage: 3φ200VAC
207
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TEL / TOKYO ELECTRON Unity IIe 855DS #293764217

TEL / TOKYO ELECTRON

Unity IIe 855DS

Oxide etcher.
172
TEL / TOKYO ELECTRON Unity IIe 855DS #197628

TEL / TOKYO ELECTRON

Unity IIe 855DS

Oxide etcher, 8" (2) chambers Mass flow controller GAS #1 C4F8 50 GAS #2 CH2F2 50 GAS #3 O2 200 GAS
471