Used TEL / TOKYO ELECTRON Unity IIe 855DS for sale

Name: TEL / TOKYO ELECTRON Unity IIe 855DS
SKU: Unity IIe 855DS
Availability: PreOrder

Etchers / Ashers

Manufacturer

TEL / TOKYO ELECTRON

Model

Unity IIe 855DS

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Oxide etcher, 8" (26) Slots SCCM DHhard Chambers Process: C5F8, Ar, O2, CHF3, CF4 Voltage: 3φ200VAC

207

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Oxide etcher.

172

Oxide etcher, 8" (2) chambers Mass flow controller GAS #1 C4F8 50 GAS #2 CH2F2 50 GAS #3 O2 200 GAS

471