Used TEL / TOKYO ELECTRON Unity IIe 855DS #293645123 for sale
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TEL / TOKYO ELECTRON Unity IIe 855DS is an etcher / asher designed to clean and planarize wafers. It is a modular equipment that can handle processing of wafers up to 300mm in diameter. The system's main features include a high-resolution planarizing mechanism, a strip-type sample-loading mechanism, and an automatic sample transfer device. It is equipped with a high-accuracy resist monitor and an advanced thin film thickness analyzer to ensure quality control throughout the process. In addition, the unit is designed to provide a high-throughput planarization process that is compatible with several process chemistries and temperatures. TEL Unity IIe 855DS is driven by an advanced and robust microcontroller machine, which minimizes the risk of data errors and allows users to precisely adjust the tool's settings. Its control interface is user-friendly and provides step-by-step instructions to ensure accuracy, efficiency and a safe working environment. It also offers several process customization options, such as a manual recipe modification and a multi-step operation mode. Furthermore, the asset is protected against corrosive agents, allowing it to work with a variety of slurries. TOKYO ELECTRON Unity IIe 855DS is supported by an advanced exhaust model that ensures proper air flow and ventilation. It is also equipped with an active elevator equipment to easily adjust the position of the wafer for optimal processing. The system also features a built-in automated cleaning unit, which helps maintain the machine's cleanliness and prevent defects from occurring. In addition, its programmable tray loader tool helps in the efficient transfer of wafers from one process to the next. The overall design of Unity IIe 855DS is focused on providing an easy-to-use, reliable and energy-efficient asset. Its architecture gives it a fast run-up time, resulting in shorter cycle times while maintaining the highest level of process efficiency. Its integrated safety features provide the user with increased peace of mind, which is especially important when working with corrosive and hazardous chemicals. Overall, TEL / TOKYO ELECTRON Unity IIe 855DS is an advanced etcher / asher model that aims to provide the user with a reliable, energy efficient, and easy-to-use solution for wafer cleaning and planarizing. With its fast run-up time, programmable tray loader, active elevator equipment and automated cleaning system, this unit is ideal for semiconductor fabrication and other related applications.
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