Used TRION Phantom II #9225903 for sale

TRION Phantom II is an etcher/asher that is designed for the processing of substrates up to 200mm in diameter. It is a state-of-the-art plasma etching and ashing equipment featuring a variable frequency RF generator that provides high power, repeatable processing control. Its advanced process monitoring and control software allows for reliable substrates processing with uniform results across multiple wafer substrates. The system maintains uniform and safe etching and ashing of a variety of materials including polysilicon, polyimide, silicate glass, and gallium arsenide (GaAs). Phantom II has an intuitive graphical user interface (GUI) that enables users to quickly set up and script automated processes with a few clicks of a mouse. Its advanced process control unit allows for optimal etching and ashing results in both manual and automated modes. The machine is designed to be robust and flexible so it can be used in advanced process steps like chemical mechanical planarization (CMP). Process parameters are quickly adjustable for different applications or substrates, making it suitable for a wide variety of materials. The tool is configurable with multiple process gas supplies for etching or ashing depending on the material type being processed. Its process chamber is equipped with vertical and horizontal gas delivery systems that evenly distribute gases through the base of the chamber to prevent hot spots. Meanwhile, the substrate holder can be heated up to 400 Celsius to ensure process reproducibility. For improved safety and reliability, TRION Phantom II also includes gas management systems to monitor and control levels of process gases such as nitrogen, argon, oxygen, and carbon dioxide. Its vacuum management asset ensures that vacuum levels remain within the specified range. The model is also lightweight and designed for ergonomic operation for greater comfort. Overall, Phantom II is a reliable and safe etcher/asher with multiple advanced features to provide uniform etching and ashing processes. Its user-friendly interface makes set up and scripting easier than ever while the reliable process control and process monitoring deliver consistent results. The equipment's lightweight frame and ergonomic design make it suitable for long-term, large-scale projects.