Used TRION Phantom II for sale

Etchers / Ashers

Manufacturer

TRION

Model

Phantom II

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Reactive Ion Etcher (RIE) ICP System Operating system: Windows 2000 Chamber, 8" Gases: SF6, He, CHF3

101

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Reactive Ion Etcher (RIE), 6" Mini lock Gas manifold Turbo.

Reactive ion etcher (RIE) ICP System Chamber, 8" Gases: SF6, He, CHF3, CF4 Foot print: Width: 0.9m