Used ULVAC CE-300I #9055173 for sale
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ID: 9055173
Vintage: 2004
Etcher, 6"
Load lock type
Power supply: Antenna, 1kW, 13.56MHz
Pumping system: TMP-DRP-APC
ESC hold
Gases: CF4, C3FF8, He, Ar, O2
2004 vintage.
ULVAC CE-300I is an etcher, also known as an asher, designed and manufactured by ULVAC, a leading provider of vacuum science technology for various industries. Its sophisticated design, offering advanced technology and a particularly compact form, make it suitable for both industrial and academic production. CE-300I utilizes physical and chemical processes to work on thin film components such as electronic technologies and other substrate materials with precision and accuracy. It makes use of a variety of non-thermal processes to create precise patterns, etch uneven surfaces, and coat materials with a wide range of substances. ULVAC CE-300I has a working area approximately 300mm x 300mm with a maximum height of 110mm. It is equipped with two independent power supplies: an ion source and a substrate source. The ion sources offer variable beam current and voltage and a working area of approximately 120mm x150mm. The ion source allows for the sputtering of selected materials onto the substrate material. The control sources offer a wide range of capacity control and a variety of program level control functions. The asher also features several safety features, including an automatic door locking mechanism and an over-temperature monitor. The door locking mechanism combines with the in-built safety alarms to ensure maximum safety to the user and the environment. Furthermore, the pressure-reduction system helps to maintain an optimum working environment while preventing any contamination. The chamber of CE-300I is divided into two compartments for easy cleaning and maintenance. The main chamber is equipped with two high purity aluminum pipes and 1.5 meters of heating zirconium insulation for efficient heat transfer. Additionally, the asher uses a dual-frequency RF generator to ensure a stable operation and uniform etching of the substrate material. ULVAC CE-300I operates on a range of power supplies, including three phase AC input, a 5-243VAC range, and a 50/60 Hz frequency. Furthermore, CE-300I features a variety of useful inputs, outputs, and ports, for easy control and connection. It is designed to be easy to operate and offers an intuitive, user-friendly interface for simple operation. In conclusion, ULVAC CE-300I is an advanced etcher designed for both industrial and academic production. With its compact form, sophisticated design, and efficient operation, it is an ideal choice for precision work and coating of substrate materials.
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