Used ULVAC CSE-1100 #9055175 for sale

ULVAC CSE-1100 is a high-resolution etcher/asher designed for the rapid production of 3-dimensional microstructures. Its spin-etch/ash technology can be used in a variety of applications such as the etching of MEMS and semiconductor substrates, the fabrication of microfluidic and nanostructures, and the formation of thick-film microcircuits. CSE-1100 is an automated etching/ashing equipment that utilizes both wet and dry etching/ashing processes. Its wet etching capabilities allow for the etching of a wide variety of different substrates, including aluminum, silicon, and germanium. The dry etching/ashing capability of ULVAC CSE-1100 enables the formation of three-dimensional structures with high precision and repeatability. CSE-1100 is equipped with two independently controlled etching/ashing systems. The primary system consists of a vacuum chamber and etching/ashing cathode, while the second unit consists of a laser light source and rotating ashing disk. During an etching/ashing cycle, the substrate is placed between the cathode and anode inside the vacuum chamber. The laser light source illuminates the substrate, providing the necessary energy to begin the etching/ashing process. As the disk rotates, it gradually removes the unwanted material and shapes the desired microstructure. ULVAC CSE-1100 is capable of etching/ashing speeds of up to 200 cm/h. Additionally, its digital precision motor and sensors provide high accuracy and repeatability, allowing for the production of intricate 3-dimensional structures with few defects. CSE-1100's onboard controller ensures consistency in the etching/ashing process, providing a well-controlled and reproducible machine. In addition, ULVAC CSE-1100 is equipped with an integrated vacuum sensor, allowing for the optimization of the etching/ashing process by monitoring pressure changes inside the vacuum chamber. Overall, CSE-1100 provides an efficient and reliable way to produce three-dimensional microstructures. Its high-precision etching/ashing tool enables the fabrication of intricate microstructures with minimal defects and consistent results. Additionally, its automated etching/ashing process and onboard vacuum sensor provide a reliable and reproducible etching/ashing asset.