Used ULVAC Enviro II #293813794 for sale

ULVAC Enviro II is an etcher / asher used for a variety of applications such as plasma etching, ashing, and cleaning operations. It is a vertically-loaded, comprehensive etcher / asher featuring a variety of automated functions and vacuum equipment configurations. The machine is designed for industrial-scale production, but can also be used for small-scale operations as needed. It features a flexible substrate transport system, allowing for the processing of various material surfaces of both single and multi-piece substrates. The unit is able to support a wide range of etch and ash treatments, enabling the user to precisely control parameters such as voltage, temperature, concentrations, and duration. Additionally, the fully automated wafer transfer mechanism ensures a high degree of reliability and repeatability. Enviro II contains a sophisticated vacuum machine suitable for all types of etching and ashing applications. It is designed for maximum process uniformity and repeatability, while simultaneously providing process control and monitoring functions. The machine's vacuum tool combines low pressure pumps with programmed high vacuum valves for higher throughput and process uniformity. The asset can be tailored to the application, and engineered to minimize particulates and maintain a consistent process environment. ULVAC Enviro II also features an advanced coolant model for use in specialty etch and dry process applications. Components such as heaters, coolers, and variable frequency drive (VFD) are designed to maximize fluid flow and cooling rate for greater process efficiency and reliability. Enviro II is customizable to meet the needs of various substrate processing. It features an open architecture and provides technicians with easy access to all components for quick maintenance and repair. Additionally, the machine includes an integrated process controller and diagnostic software package with an interactive graphical user interface. This type of software package makes it easier to set up, control and diagnose etching and ashing processes. In summary, ULVAC Enviro II is an automated etcher-washing equipment designed for both large and small-scale production. It features advanced vacuum, coolant and controller technology that is tailored to the application for increased process efficiency and reliability. The system is open-architected, with easy access for maintenance and diagnostics, and an intuitive user interface for setup and operation.