Used ULVAC Enviro #9398706 for sale

ULVAC Enviro is a superior etching/ashing system designed to meet the challenges of advanced semiconductor fabrication processes. It is an advanced system with a highly reliable, automatic protection mechanism for total process control. The system is equipped with an automatic sense-and-control unit to accurately monitor the process conditions and provide high levels of etching/ashing performance. Enviro features an intuitive graphical user interface and touch screen with a simple icon driven menu enabling easy operation and search functions. The user-friendly software allows up to ten different etching/ashing recipes to be stored and recalled quickly. The included cooling and heating programs come with preset temperature and process time recommendations, and can be adjusted to suit the specific application. ULVAC Enviro offers 4 process chambers with separated controls for each chamber. To ensure high-quality etching/ashing results, ULVAC etch chambers are supplied with an adjustable plate assembly that provides a highly uniform etching pattern across the whole plate area. This helps in preserving etching / ashing characteristics of different semiconductor materials during the same batch cycle. The etch / asher can be connected to a complete smart wafer trimmer unit featuring an automatic gas mixture mix to meet the needs of the process. Enviro also offers high temperature aluminum chambers (up to 600℃) and its processes are designed to meet ultrafine-feature etching / ashing of the hundreds of stainless steel, nickel, and tungsten alloys used in advanced semiconductor fabrication. ULVAC Enviro provides reliable, top-of-the-line material etching/ashing results, with repeatability and precision demanded by the industry. Its simple menu options, control features, and reliable process chamber design reduce process times and improve yield. ULVAC etch/ash technology increases productivity, lower sample costs, and help ensure optimal device reliability and performance.