Used ULVAC Luminous NA 800 #293669776 for sale

ULVAC Luminous NA 800 is an etcher/asher used for semiconductor applications. It is a vertical type plasma etcher that provides superior quality for etching processing of various materials, such as semiconductor materials, glasses, and ceramics. With its advanced technology and sophisticated design, Luminous NA 800 is able to deliver extremely low ion energy and low temperatures. This ensures minimal material and substrate damage, as well as a minimum of sputtering. ULVAC Luminous NA 800 consists of four main components: the etch chamber, source chamber, pump chamber, and the control equipment. The etch chamber is a stainless steel insulated pressure vessel with a circular quartz window. It contains plasma delivered by RF coils and a nitrogen gas supply to the center of the chamber. The source chamber is used as a storage container for gases, and the pump chamber is for in-system cleaning and tuning for optimal performance. The control unit consists of multiple input keys, a digital display, an operator controlled gas flow machine, and an RF generator. The etch chamber is equipped with two match-adjustable RF coils and two sets of automatic power tuning networks, providing high etch selectivity with minimal over etch. With its advanced automatic plasma control tool, Luminous NA 800 is able to achieve higher process uniformities compared to conventional etch systems. This makes it ideal for precision etching. Additionally, the RF generator can maintain precise, precise power at any power or frequency, allowing for steeper etch profiles. ULVAC Luminous NA 800 also offers the highest process safety standards. It is equipped with multiple interlocks to ensure that the highest safety standards are met. Additionally, it also has a number of features to enhance process reproducibility, such as automatic gas control, automatic feedback, and constant power/frequency control. This ensures that the highest quality parts are produced. Overall, Luminous NA 800 is a powerful etcher/asher designed to meet the demands of semiconductor applications. With its innovative design and advanced technology, ULVAC Luminous NA 800 is able to deliver superior etch quality and precision at very low temperatures and ion energies. It has a number of features to ensure the safety and reproducibility of the process, making it one of the best etch systems available.