Used ULVAC NE-5000N #293758555 for sale

ULVAC NE-5000N is a precision etching and ashing equipment designed to offer suitable accuracy and precision etching and ashing processes used in the production of electronic components and semiconductor devices. It offers increased reliability, precision, contamination control and throughput to facilitate the ablation and selective etching. It is suitable for the production of multiple layer metallic wiring, MEMS sensing elements, and thin wafer process technologies. The system's precision etching capability provides materials removal at nanometer and micrometer levels. It uses an ultra high vacuum (UHV) chamber with an integrated RF/DC source and two upstream high power RF sources that operate in parallel to provide a wide range of plasma etches. The unit enables highly-controlled and repeatable etch processes through its advanced language (ADL) that allows for precise process control. It also offers precise etching recipes and fast etch cycles. The integrated RF/DC source is capable of selectively etching a wide range of materials, including metals, polymers and dielectrics. The RF/DC source operates in a pulsed or continuous mode, allowing for further control of the etching time and depth. Additionally, the RF source is also capable of high power plasma etch processes, including anodizing and cleaning of various materials. The vacuum chamber is fitted with a multi-user process unit, which facilitates simultaneous etching of multiple wafers. The machine also incorporates an ion gun and ion beam etching capability, enabling anodic oxidation and selective etching of aluminum layers. It also has a sputter coating and ion beam deposition tool for thin film etching and deposition. The advanced temperature control and chamber design enable precise and repeatable process control for all process cycles, including wafer cooling, which allows for optimized etch rates, uniformity, and repeatability. NE-5000N also utilizes a new cleaning asset to prevent contamination, which helps extend the life and improve reliability of process chambers. The model is designed to be highly reliable and requires minimal maintenance. Its advanced software can be used to troubleshoot a variety of process issues. ULVAC NE-5000N is also designed with user-friendly touchscreen displays and controls, making it easy to operate and adjust parameters.