Used ULVAC NE 550 #9236725 for sale

ULVAC NE 550 is a plasma etcher / asher designed for planar processing of high-precision substrates of up to 450mm in size. It is a reliable, user-friendly and versatile tool for etching various material surfaces. NE 550 is equipped with a powerful etch station and a company floor space saving design. The machine has an integrated MF antenna equipment for plasma treatment, allowing for a more uniform etch rate of the substrate, as well as an adjustable antenna, providing for vertical and horizontal control of the chamber. The custom software package of ULVAC NE 550 allows the user to program the process parameters for a multitude of processes and materials. The standard hardware components included with the package are an auxiliary gas packet heater, an automatic gas supply system and a remote electrical shock unit, providing for a safe and reliable operation. The etcher's process chamber is equipped with an independent cooling machine to maintain the optimal temperature and pressure. The efficient pumping tool is designed to reduce particle contamination during the etching process. The temperature control of the chamber is achieved through a PID temperature controller connected to a PID-type controller. NE 550 is equipped with a high-precision stage for transport and adhesion of the substrate after etching, and a robot arm with a precision automatic movement for the pick and place of the substrate during the etching process. The robotic arm is driven by a motor encoder, and the position of the substrate is measured to ensure precise handling of the substrate. In terms of safety, the machine is designed to detect gas leaks in order to reduce the risk of accidents. In addition, the machine includes an extensive safety-control asset, which includes emergency-stop buttons, an escape detection feature, and an automatic shut-off mechanism. Overall, ULVAC NE 550 etcher / asher is an ideal solution for the mass production of high-precision parts, and is suitable for use with a wide range of materials. It is easy to operate, reliable, and is designed with safety and precision in mind.