Used ULVAC NE 550EXa #293627815 for sale

ULVAC NE 550EXa is a full-featured etcher / asher that provides superior etch and ash performance. The equipment is equipped with an advanced chamber design and a variety of process, pump and extraction options that can be tailored to meet even the most challenging etch and ash requirements. NE 550EXa chamber design features advanced dual-zone, rotating and linear drive, and independent multi-zone etch and ash capabilities. The process chamber utilizes an RF-powered, stapled-wall design with a double-wall process exhaust manifold for maximum pump chamber purging efficiency and optimum process control. The dual-zone design enables etching and ashing of features in multiple areas of the wafer. ULVAC NE 550EXa also features a variety of process, pump and extraction components, including a high-efficiency, multi-speed magnetron sputtering source, an internal windowed cooling chamber, a high-demand multi-channel pump, a wide variety of optional process gases and their mixtures, and an electrically isolated chamber. The optional high-efficiency, multi-channel pump is ideal for larger-volume processes that require maximum process throughput and control. The system also offers customizable process programs and variable-speed motors to streamline and automate the etch and ash process. The programmable process settings allow users to configure process parameters such as chamber pressure, RF sputter power, chuck voltages, coat/etch/ash times, temperature, and gas flow. In addition, NE 550EXa is designed for safety and easy maintenance. The unit features a safety interlock machine and a comprehensive monitoring tool with audible and visual alarms for potentially hazardous conditions. The asset also includes an easy-to-use electronic control panel and color graphical user interface, laboratory automation interface, and network-enabled operation. ULVAC NE 550EXa is an advanced etcher and asher designed to meet even the most stringent etch and ash requirements. Its advanced chamber design, customizable process programs, and variety of process, pump and extraction options simplify the process of creating precise, feature-rich parts for manufacturing. Whether for etching and ashing small or large parts, NE 550EXa can help reduce costs, improve efficiency and make the production process easier and more reliable.