Used ULVAC NE-550EXz #293797487 for sale

ULVAC NE-550EXz is an advanced plasma etcher / asher designed to support a variety of nanofabrication applications. It is particularly suitable for the fabrication of nanodevices due to its excellent electrical characteristics and tight dimensions. NE-550EXz has efficient process control and is equipped with a high-precision quartz quartz chamber, allowing for precise control of etch parameters and results. The chamber is designed to ensure a consistent supply of reactive gas, and is capable of reaching low ambient pressures (less than 6 mTorr). It also features improved preferential handling of sample materials, including III-V and polymer-based substrates. ULVAC NE-550EXz also features built-in control and monitor functions. Its computer control system allows operators to precisely monitor gas flow, pressure, and plasma conditions during etching. It also utilizes real-time feedback in the form of a temperature control algorithm, ensuring the operator of consistent results. The system also supports automatic real-time trimming of the substrate, making small size adjustments in order to optimize the etch profile. In terms of power, NE-550EXz offers users excellent performance. It is equipped with two microwave generators - one high-frequency pulsed generator and one low-frequency continuous generator - providing ample power to the plasma source. This allows it to realize etch processes with high selectivity and uniformity. In addition, it is capable of achieving cycle times of up to 15 seconds, making it a fast system ideal for quick-turn production of nanodevices. Finally, ULVAC NE-550EXz is backed by ULVAC renowned service and support. Experienced technicians can provide assistance with installation, commissioning, data logging, and scheduled maintenance. As a result, users of NE-550EXz can be confident they are backed by the highest levels of customer service.