Used ULVAC NE-950EX-V #9298401 for sale
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ID: 9298401
CCP Etcher, 6"-12"
Automated cassette to cassette handling
2015 vintage.
ULVAC NE-950EX-V is an etcher / asher equipment constructed from a modular design. It enables high quality etching of a wide range of different materials, from metals to semi-conductors. It is capable of etching / ashing a variety of different sizes of substrates, up to and including 250mm wafers. The system is equipped with a sensor to detect the size of the substrate so that the correct settings can be applied for each etching process. The unit is also capable of holding up to three different etching and two ashing stations, allowing multi-step etching and ashing processes to be carried out in one run. The main feature of NE-950EX-V is its versatility. It has a four-axis, X-Y-Z-θ control machine, which allows each substrate to be precisely positioned and adjusted for maximum etch accuracy. The tool can also accommodate a variety of different process gases and is able to precisely control the flow of each gas. This allows for different etching and ashing processes to be used for different applications with greater control over etching profiles and performance. The asset is driven by an automated control unit, which is user-programmable for customised etching and ashing operations. It is also designed with a built-in auto-tuning model for optimised process parameters, and can be remotely monitored and controlled. This allows for fast, stable and reliable operation even during process changes. The equipment also has comprehensive safety features, with interlocks and monitoring elements to prevent unauthorised and potentially dangerous operations. In conclusion, ULVAC NE-950EX-V is a powerful and capable etcher / asher with precision control and automation. With its high flexibility and optimised operations, it is an ideal system for all types of etching and ashing applications.
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