Used ULVAC NE-950EX #293828963 for sale

ULVAC NE-950EX etcher/asher is an advanced dry etching equipment used for precision etching or ashing of extremely thin films in a variety of applications. This system is capable of handling a wide variety of materials such as Si, GaAs, Cu, and others. With its counterbalanced load frame and improved thrust capacity, this unit is designed to maintain high throughput and accuracy levels while keeping maximum control of the process parameters. NE-950EX provides a highly precise etching or ashing process. This machine is equipped with multiple process capability which offers high throughput and fast turn-around time. This includes auto-adjustment of the correct wafer thickness, precise pressure control, and precise temperature control. Its DC operation ensures consistent performance and eliminates the risk of electrostatic discharge. Additionally, it is integrated with an advanced pipe pressure monitor that ensures particle-free particles in the process chamber. Utilizing ULVAC advanced Plasma Generator, ULVAC NE-950EX provides high etching speed with minimal damage to the substrate material. This tool features a Multi-Nozzle plasma source that allows for advanced control over etch rate and selectivity. With the addition of a three-electrode asset, the model is able to precisely control the size, shape, and depth of etched patterns. NE-950EX provides excellent process stability with its Process Automation Equipment. This system can store up to 15 different recipes and can be adjusted with simple push-button operations. This automation unit also allows for efficient maintenance through remote operation and diagnostics. For additional safety and protection, the machine is also integrated with an automatic, delayed overpressure protection and an emergency shut-off switch. ULVAC NE-950EX is a highly advanced etcher/asher that provides a quick and precise process with superior reproducibility. With its integrated automation tool, this asset is able to provide superior etching quality with a high degree of reproducibility and advanced control. Combined with low maintenance costs, this model offers an excellent return on investment.