Used ULVAC NE-950EXk #9359650 for sale

ULVAC NE-950EXk is an etcher / asher designed for the production of high-quality microelectronic components. This equipment uses state-of-the art technology to create consistently precise and repeatable results with minimal contamination. This system is an all-in-one etcher / asher, with integrated source and chamber components, both of which are modular and designed for easy scalability and flexibility. The source module of this unit consists of a gas distribution machine that includes a gas cabinet and shower, an RF generator, and a hot filament assembly. The gas cabinet and shower provide precise and reproducible amounts of process gases to the process chamber, allowing precise control over the performance of the process. The RF generator provides the power for FCCVD, F-CVD, and plating etch processes, providing controlled vapor deposition or precisely tuned etching of multiple layers, the RS generator ensures repeatability and performance. The Hot Filament Assembly (HFE) module is designed for rapid thermal process technology, providing an inert ambient for thermal oxidation, annealing, and other processes. The process chamber module of NE-950EXk is designed to provide excellent process uniformity, repeatability, and robustness. It is an integrated wet bench tool equipped with a cooling water exhaust asset. This chamber is designed to work with an extensive suite of process applications, including ultra-high density etch, sputter etch, plasma anneal, and RIE etch/etch. The chamber is also designed for multi-purpose applications such as film deposition, film cleaning, and sputtering. The ultra-high precision, repeatability, and excellent performance of the etch and asher processes make ULVAC NE-950EXk the ideal process solution for a wide array of microelectronic components and production processes. In addition to the highly reliable model design, ULVAC provides a number of support services for NE-950EXk. These services provide complete start-up assistance, installation guidance, consultation and troubleshooting services, and process development and optimization. With these services, ULVAC NE-950EXk is designed to deliver the highest level of performance in the semiconductor and microelectronics markets.