Used ULVAC Phoenix #9186931 for sale

ULVAC Phoenix
Manufacturer
ULVAC
Model
Phoenix
ID: 9186931
Ashing system 1996 vintage.
ULVAC Phoenix is an etcher/asher designed for precision microfabrication. The equipment utilizes a shallow source/drain profile etching process and is capable of producing high resolution patterns with superior resolution and repeatability. The system features an advanced set of components, including an ultra low voltage (ULV) source, an advanced substrate holder, and arobust controller. All of these components work together to create a highly accurate etching and ashing process. The source in Phoenix is an ultra-low voltage (ULV) power supply that is capable of delivering a wide range of voltages ranging from 0-1300V, enabling precise control over current and voltage settings. This feature ensures precise profiles and stable etching/ashing processes. Additionally, ULVAC Phoenix uses a precise substrate holder which is designed to minimize electrical interference between the substrate and the source, allowing for optimal results. The controller in Phoenix is advanced and intuitive, offering the user a wide variety of etching and ashing parameters. It also allows for 3D profile control, meaning users can precisely etch/ash the surfaces of complex structures with ease. Additionally, the controller includes an advanced timing unit, which can be used to control the etching and ashing process with great accuracy. ULVAC Phoenix is one of the most advanced etching/ashing systems available, making it an ideal choice for the microfabrication of precise, high resolution patterns. The machine is simple to use, and produces excellent etching and ashing results. It provides users with an intuitive and easy to use interface that allows them to quickly and accurately achieve their desired patterns. High quality results and an easy to use control tool make Phoenix an excellent choice for any etching/ashing application.
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