Used ULVAC uGmni-200E #293823990 for sale

Manufacturer
ULVAC
Model
uGmni-200E
ID: 293823990
Vintage: 2024
Dry etching system 2024 vintage.
ULVAC uGmni-200E is a cutting-edge etcher/asher equipment that incorporates advanced technology and innovative features to deliver high-performance and precise etching and ashing capabilities. Developed by ULVAC, a leading global manufacturer of vacuum equipment and solutions, uGmni-200E is designed to meet the demanding requirements of semiconductor manufacturing, research laboratories, and other industries where precision etching and ashing processes are crucial. At the heart of ULVAC uGmni-200E system is its sophisticated process chamber, which is constructed with high-quality materials and features a compact design for efficient use of space in a cleanroom environment. The chamber is equipped with multiple gas inlets and exhaust ports to facilitate the introduction and removal of process gases, as well as ensuring optimal gas flow dynamics for uniform etching and ashing results. One of the key highlights of uGmni-200E is its advanced plasma generation technology, which enables highly efficient and uniform plasma processing. The unit employs a high-frequency RF power source to generate plasma from the process gases, which is then used to etch or ash the substrate material with precision and control. The plasma source is tunable to accommodate a wide range of process conditions and substrate materials, making ULVAC uGmni-200E versatile and adaptable to various applications. In addition to its plasma generation capabilities, uGmni-200E is equipped with a state-of-the-art electrode machine that ensures excellent wafer uniformity and stability during processing. The electrode tool is designed to provide consistent RF power distribution across the substrate surface, enabling uniform etching and ashing throughout the wafer. This results in high-quality and reliable process outcomes, essential for critical semiconductor fabrication processes. ULVAC uGmni-200E also features a comprehensive control and monitoring asset that allows users to easily program and adjust process parameters for optimal results. The model is equipped with a user-friendly interface that provides real-time data on process conditions, plasma parameters, gas flow rates, and other relevant information. This enables operators to fine-tune the process settings and make adjustments on-the-fly to achieve desired etching and ashing outcomes. Furthermore, uGmni-200E is designed with safety and reliability in mind, incorporating various interlocks and safeguards to ensure operator protection and equipment integrity. The equipment is engineered to meet rigorous industry standards for performance and quality, making it a trusted solution for demanding applications in semiconductor manufacturing and research. Overall, ULVAC uGmni-200E is a cutting-edge etcher/asher system that offers unmatched performance, precision, and reliability for a wide range of applications. With its advanced plasma generation technology, electrode unit, and control features, uGmni-200E is a versatile and efficient solution for achieving high-quality etching and ashing results in semiconductor fabrication and research environments.
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