Used ULVAC UNA-2000N #9055149 for sale

ULVAC UNA-2000N
Manufacturer
ULVAC
Model
UNA-2000N
ID: 9055149
Ashing system Cassette to cassette Loadlock Power supply: Microwave 600 - 1000W, 2450MHz +/- 50MHz High frequency: 200W, 13.56MHz 1992 vintage.
ULVAC UNA-2000N is a precision dry etcher/asher which is designed for a host of industrial applications. This machine is equipped with a high precision focusing lens and high speed multi-stage thin film mask stage. It is capable of etching single layer films with a thickness up to 2 microns, as well as multi-layer films up to 10 microns in thickness. Its wide range of operating parameters allow for accurate, repeatable, and low-cost etching processes. UNA-2000N is equipped with a 2000-Watt RF power source which enables it to produce high etching rates and excellent precision in the etching process. It is also equipped with a frequently adjustable raster size, allowing the machine to be set up for various sizes of etching job. Additionally, its low-temperature plasma chamber and low-pressure operation help minimize particle generation and film contamination. ULVAC UNA-2000N has a 600-degree Celsius upper limit temperature, making it suitable for heat-sensitive materials including glass, ceramic, cermet, carbon, and polymers. Its photo-resist-removal and in-situ cleaning functions are ideal for the most intricate etching processes. Furthermore, its built-in gas system allows for a wide variety of gases, providing increased etching flexibility. UNA-2000N is equipped with a range of safety features for reliable performance and long-term durability. Its dynamic temperature control system ensures an even distribution of heat along with a consistent temperature, while the chamber protection shutter prevents contamination from entering the chamber. Additionally, its built-in monitor provides accurate monitoring of process data and system alarms, helping to prevent any unexpected occurrences during the etching process. This precision etcher/asher is suitable for a wide range of industrial applications, which include semiconductor device processing, wafer level packaging, and micro-components etching. Its advanced features, coupled with its exceptional performance, make it an ideal choice for cleanroom environments. ULVAC UNA-2000N is the perfect choice for precise etching and ashing in various industrial settings.
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