Used EATON NOVA / AXCELIS 25D1HE #9142166 for sale

EATON NOVA / AXCELIS 25D1HE ion implanter is a high-precision, high-performance machine used in the manufacture and assembly of semiconductors. This ion implanter is particularly well suited for high-efficiency ion implantation and monitoring of 3D stacked dies or MEMS/MOEMS devices. The important components of AXCELIS 25D1HE include the: high-resolution, high-precision scanning electron microscope; a focused ion beam (FIB) column; a remote plasma source (RPS); and a high force electron beam (HFEB) column. The microscopy capabilities of EATON NOVA 25D1HE allow for imaging of nanostructures with sub-angstrom resolution. The ion beam columns are capable of performing ion implantation with implant energies of up to 1 MeV and can focus the beam to ensure uniformity of the implantation. The RPS gives the user the ability to generate a plasma within the implantation chamber. This facilitates faster implantation, improved uniformity of the implant, and reduced device misalignment. The HFEB column offers high-precision feature control, allowing the user to etch features with improved accuracy and repeatability. 25D1HE also provides an integrated monitoring equipment that continuously records the performance of the ion implanter, providing real-time feedback to the user. This monitoring system utilizes various sensors and diagnostics to measure and display the values of diagnostic parameters such as ion beam parameters, chamber pressure, and cell temperature. It also allows the user to track and record information on the implantation process to ensure the highest quality and accuracy of the finished device. EATON NOVA / AXCELIS 25D1HE is a reliable, advanced ion implanter and monitoring unit. It provides superior performance and accuracy in a variety of ion implantation tasks, making it an excellent choice for both prototyping and production applications. With its integrated monitoring machine, users can continually assess the performance of the machine, enabling them to produce devices with optimum results.