Used EATON NOVA / AXCELIS 6200 #293752727 for sale

EATON NOVA / AXCELIS 6200 is a high-performance ion implanter and monitor. It is designed for high-volume production in ion beam processing and is used in a wide range of industries including semiconductor manufacturing, automotive, aerospace, and medical. AXCELIS 6200 is a fully self-contained equipment consisting of four main components: the ion gun, the high voltage power supply, the beamline monitors and the control system. The ion gun is powered by the high voltage power supply which accelerate the ions to their operating energies. The beamline monitors measure the exact parameters of the ion beam for precise operation and feedback to the control unit. EATON NOVA 6200 is capable of performing ion implantation on wafers up to 6" in diameter and up to 12" in length. It is capable of performing ion implantation at energies up to 3 million volts per meter, with beam currents from 20 to 10,000 nanosamples. It is also capable of implanting both positive and negative ions, along with a variety of other ions, including B11, Gaif, O2+, N2+, P2+, and Ar+. 6200 offers ultimate precision in terms of beam geometry, beam energy, beam current, and dose. It also offers extremely uniform beam profiles and perforation, without the use of a mask. Moreover, the machine is capable of performing rapid processing with excellent repeatability, providing a high level of productivity and accuracy. EATON NOVA / AXCELIS 6200 also comes with built-in safety features, such as Visual Alarm Tool (VAS), a digital interlock for protection against malfunction, and advanced HV power supply and beam monitor protection systems. This ensures that the asset is safe to operate at all times. AXCELIS 6200 is the perfect choice for the efficient operation and control of advanced, dependable, and reliable machine performance. It provides superior performance, accuracy, and flexibility in an easy to use and cost-effective package.