Used EATON NOVA / AXCELIS 6200 #9182215 for sale

EATON NOVA / AXCELIS 6200 ion implanter and monitor is a high-performance, state-of-the-art ion implantation equipment. It combines leading-edge technology with years of experience, giving optimum performance, safety, and reliability. The system's source technology supports a wide range of implant energies and high doses. The source is cartridge-based, with replaceable drawer-loaded crucibles and cavity sources, and is designed for ease of maintenance. The scanner uses an electromagnetic field that allows precise control of the implant direction and size. Its design ensures uniform dose distributions and control of line edges and grid regions. AXCELIS 6200 allows up to four different doses and implant angles. The resulting implanting patterns are monitored with an optical encoder mounted on the scanner rotation shaft. This unit allows the implanting angle to be monitored with an accuracy of 1.3 degrees. The machine also includes a high-performance mass-flow controller for precise control of feed gas flowrates and a ride-through power feature to maintain process stability during power fluctuations. EATON NOVA 6200 machine is equipped with an advanced wafer temperature control tool to ensure uniform temperatures across the wafer, reducing damage to sensitive devices caused by overheating. It includes both automatic and manual wafer sorting capabilities. 6200 machine includes powerful diagnostic tools and a graphical user interface to aid in diagnosing problems and troubleshooting. It also incorporates advanced real-time asset monitoring, ensuring that the model is operating in a safe and reliable manner at all times. With its high-end performance features and advanced equipment monitoring, EATON NOVA / AXCELIS 6200 provides an ideal solution for today's demanding ion implantation applications.