Used EATON NOVA / AXCELIS 8250HT #9410494 for sale
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ID: 9410494
Implanter
Beamline and endstation
(2) Valves
Higher maintenance flexibility
Enhanced ELS Ion source:
Common with MC3, HE, HE3
Active Vaporizer Cooling (AVC)
Source lifetime: > 400 Hours
3-Axis extraction electrode:
Extraction voltage: 15 kV - 40kV
Water cooled
Water cooled: 90°
Mass analysis Magnet
Closed-loop AMU controller
(2) Vaporizers
High temperature
AVC Temperature
Auto tune beam current target
Achieving desired energy
Beam scanning and beam correction
Electrostatic angle correction
Beam parallelism measurement
Exceptional beam parallelism
Angular Energy Filter (AEF)
Dosimetry system and charge control
Secondary electron shower
Electrostatic clamping
In-air wafer handling
In-vac wafer scanning
Wafer handling sequence
Control system
Uniformity and repeatability
Proven control system.
EATON NOVA / AXCELIS 8250HT is a sophisticated ion implanter and monitor for complex semiconductor fabrication applications. It is a tool that processes materials with high accuracy and is capable of analyzing, regulating and controlling the production processes of high-purity, precision materials. With its grand pulse width and short processing time, it is an efficient solution for high power ion implantation. AXCELIS 8250HT utilizes a combination of high-tech accelerators, power supplies and process control systems to keep the production running at an optimal level. It is equipped with a variety of features designed to improve productivity, accuracy and safety. Its Flexible Accumulator Equipment (FAS) can quickly scan a wafer or solar cell to ensure its accuracy and reduce errors. Its Programmed Digital Control System (PDC) is used to precisely control the process parameters to ensure the highest possible purity and performance. It also includes an Intact/Darkside Auto-Analysis (IDAA) unit that allows for analyzing, isolating, and adjusting parameter settings for optimized results. In addition to its automated functions, EATON NOVA 8250 HT provides operators with a suite of monitoring tools. Its Graphical User Interface (GUI) provides a simple and intuitive way to manage the process and make adjustments as necessary. Its Remote Diagnostic Machine (RDS) is used to troubleshoot, diagnose, and fine-tune any malfunctions or inconsistencies in the tool. Its Quality Mapping technology can accurately detect and analyze implanting effects on different locations on the wafer or solar cell. Finally, its User-Switchable Stage offers the possibility to quickly switch between different implant conditions to ensure efficient processes without losing any data. Altogether, EATON NOVA 8250HT is an advanced and innovative ion implanter and monitor with a variety of features designed to improve process accuracy, speed and safety. Its versatile and comprehensive controls make it an ideal solution for specialized semiconductor manufacturing applications.
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