Used EATON NOVA / AXCELIS Al Disk for GSD #293655848 for sale

ID: 293655848
Wafer Size: 8"
8".
EATON NOVA / AXCELIS Al Disk for GSD is a state-of-the-art ion implanter and monitor designed for applications in the semi-conductor fabrication industry. This equipment integrates a digital ion monitor, miniature ion implanter, and large area digital detector to provide material-profile information for a reliable and cost effective process control. The monitor is designed to allow for the highest quality beam profile control, ensuring a clean and accurate implantation. The system is able to detect and monitor ions based on their mass and charge distribution by utilizing Mass-Range Measurement (MRM) and Tandem-Ionization (TI) technologies. Additionally, the ion implanter houses an electromagnet to maintain uniform distribution of ions and a high-pulse laser to prevent wafer contamination. With AXCELIS Al Disk for GSD, users have access to an easy-to-use graphical user interface that allows for a seamless and intuitive operation of the unit. Additionally, the machine contains a digital imaging sensor connected to an imaging detector for optimized process monitoring. EATON NOVA Al Disk for GSD has been designed to provide maximum usage flexibility and throughput. With the combination of the on-board controller, the tool is able to vary operating frequencies, control pulse rates, and monitor temperatures for an optimal operation. Moreover, the asset has adjustable implantation depths, a wide range of implantation angles, and implantation configurations designed for different implanting materials and applications. In addition to its performance, Al Disk for GSD also features advanced user protection features, including real-time observation (including alarms and notifications) and remote monitoring capabilities. This model is further complemented by an Al Disk electrode surface treatment (ATES) equipment which helps prevent degradation of electrode surfaces. Overall, EATON NOVA / AXCELIS Al Disk for GSD is a state-of-the-art ion implanter and monitor with cutting-edge features that provide a reliable and cost-effective process control. It is designed to provide flexible yet accurate implantation with user protection features and performance features that allow for maximum usage flexibility and throughput. With its advanced digital imaging sensor, users can ensure that the highest quality of implantation is achieved.
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