Used EATON NOVA / AXCELIS GSD 100-HC #293829779 for sale
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ID: 293829779
Wafer Size: 6"
Ion implant, 6"
(4) Cassettes
Standard specific layout
ELS Source
Source analyzer magnet
Parallel beam sweep
Beam energy configuration:
Beam energy: 10 ~ 160 keV
Extraction mode: 10 ~ 80 keV
Acceleration mode: 10 ~ 80 keV
Vacuum pump system:
Diff pump: VHS
Cryo pump: CTI-8, CTI-10
Cryo compressor: CTI9700A
Dry pump: IQDP40, IQDP80
Gas / Model / MFC Type
AsH3 / Needle valve / SDS
PH3 / Needle valve / SDS
BF3 / Needle valve / SDS
Ar / Needle valve / Standard.
EATON NOVA / AXCELIS GSD 100-HC is a state-of-the-art ion implanter and monitor equipment designed for high-performance semiconductor manufacturing processes. This sophisticated piece of equipment combines precision ion implantation capabilities with advanced monitoring functions to ensure optimal operational efficiency and product quality. It is part of the GSD series developed collaboratively by EATON Corporation and AXCELIS Technologies, two renowned leaders in the semiconductor equipment industry. At the core of AXCELIS GSD 100-HC is its ion implantation technology, which involves the process of accelerating ions to high energies and directing them onto a target substrate to modify its material properties. This technique is crucial in semiconductor fabrication for doping silicon wafers with specific impurities to create the desired electrical characteristics in integrated circuits. EATON NOVA GSD 100-HC excels in delivering precise ion beams with high energy levels and adjustable dose rates, allowing for the customization of implantation parameters to meet varying process requirements. One of the key features of GSD 100-HC is its advanced monitoring capabilities, which enable real-time tracking and analysis of the ion implantation process. The system is equipped with multiple sensors and detectors that provide detailed feedback on beam current, energy, angle of incidence, and implantation depth, ensuring precise control and monitoring of the implantation process. This real-time data acquisition and analysis allow operators to make immediate adjustments to optimize process parameters and ensure consistent and reliable results. EATON NOVA / AXCELIS GSD 100-HC is built with a high degree of automation and programmability, facilitating easy integration into semiconductor fabrication lines and enabling seamless operation with other manufacturing equipment. The unit features a user-friendly interface that allows operators to set up process recipes, monitor performance parameters, and analyze data with intuitive software tools. This user-friendly design minimizes operator error and maximizes operational efficiency, making AXCELIS GSD 100-HC an ideal choice for high-volume semiconductor production environments. In terms of performance, EATON NOVA GSD 100-HC offers exceptional reliability and repeatability in ion implantation processes, ensuring consistent results and high product quality. The machine is designed to deliver precise and uniform ion beams across the entire substrate surface, minimizing variations in dopant concentration and electrical characteristics. This level of precision is critical for semiconductor devices' performance and reliability, making GSD 100-HC a valuable asset for semiconductor manufacturers. Overall, EATON NOVA / AXCELIS GSD 100-HC ion implanter and monitor tool represent a cutting-edge solution for advanced semiconductor manufacturing processes. Its combination of high-performance ion implantation technology, advanced monitoring capabilities, automation features, and user-friendly interface make it a versatile and reliable tool for producing high-quality semiconductor devices. This asset exemplifies the commitment of EATON Corporation and EATON NOVA Technologies to innovation and excellence in semiconductor equipment, supporting the industry's advancement towards ever-higher levels of performance and productivity.
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