Used EATON NOVA / AXCELIS GSD 200-HC #293829781 for sale
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ID: 293829781
Wafer Size: 6"
Ion implant, 6"
(4) Cassettes
Standard specific layout
ELS Source
Source analyzer magnet
Y Scan and rotary
Beam energy configuration:
Beam energy: 10 ~ 160 keV
Extraction mode: 10 ~ 80 keV
Acceleration mode: 10 ~ 80 keV
Vacuum pump system:
Diff pump: Diff pump8
Cryo pump: CTI-8, CTI-10
Cryo compressor: CTI9700A
Dry pump: IQDP40, IQDP80
Gas / Model / MFC Type
AsH3 / MFC / SDS
PH3 / MFC / SDS
BF3 / MFC / SDS
Ar / MFC / Standard.
EATON NOVA / AXCELIS GSD 200-HC is a cutting-edge ion implanter and monitor designed for high-precision semiconductor processing applications. Leveraging advanced technology and innovative features, this equipment offers unparalleled performance and reliability in the ion implantation process. At its core, AXCELIS GSD 200-HC is equipped with a high-current ion source capable of generating a focused ion beam with exceptional precision and accuracy. This ion source is housed within a vacuum chamber to minimize contamination and ensure consistent performance throughout the implantation process. The ion implantation process itself involves bombarding a substrate with high-energy ions to modify its material properties and create specific electrical characteristics. EATON NOVA GSD 200-HC is capable of precisely controlling the energy, dose, and distribution of ions to achieve the desired implantation profile, making it ideal for a wide range of semiconductor manufacturing applications. One of the key features of GSD 200-HC is its advanced beamline system, which includes electrostatic and magnetic elements to steer and focus the ion beam with high accuracy. This beamline unit allows for precise control over the implantation process, ensuring that the ions are delivered to the substrate with minimal divergence and scatter. In addition to its exceptional beamline machine, EATON NOVA / AXCELIS GSD 200-HC is equipped with a comprehensive monitoring and control tool to optimize the implantation process. This asset includes real-time monitoring of key parameters such as beam current, energy, and dose, allowing operators to fine-tune the process for optimal performance. Another important feature of AXCELIS GSD 200-HC is its advanced wafer handling model, which automates the loading and unloading of substrates to minimize downtime and maximize throughput. This equipment can accommodate a variety of substrate sizes and shapes, making it highly versatile for different semiconductor manufacturing applications. To ensure the safety and reliability of the ion implantation process, EATON NOVA GSD 200-HC is equipped with a range of safety interlocks and monitoring systems to prevent accidents and ensure smooth operation. These safety features include radiation detection sensors, vacuum leak detectors, and emergency shutdown mechanisms to protect operators and equipment. Overall, GSD 200-HC represents a state-of-the-art ion implanter and monitor that offers exceptional performance, reliability, and versatility for semiconductor manufacturing applications. With its advanced technology and innovative features, this system is well-suited for high-precision implantation processes in the semiconductor industry, making it an essential tool for optimizing device performance and yield.
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