Used EATON NOVA / AXCELIS GSD 200-HC #293829783 for sale
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ID: 293829783
Wafer Size: 6"
Ion implant, 6"
(4) Cassettes
Standard specific layout
ELS Source
Source analyzer magnet
Y Scan and rotary drive
Beam energy configuration:
Beam energy: 0 ~ 80 keV
Extraction mode: 0 ~ 80 keV
Vacuum pump system:
Turbo pump: Seiko seiki pump STPA2203C2
Cryo pump: CTI-On board-8, On board-10
Cryo compressor: CTI-9650
Dry pump: QDP-80 (Two units)
Gas / Model / MFC Type
AsH3 / MFC / SDS
PH3 / MFC / SDS
BF3 / MFC / Standard
Ar / MFC / Standard.
EATON NOVA / AXCELIS GSD 200-HC is a cutting-edge ion implanter and monitor designed for high-throughput semiconductor processing applications. This advanced equipment incorporates state-of-the-art technology to deliver precise and reliable ion implantation for the production of integrated circuits with exceptional quality and performance. The NOVAAXCELIS GSD 200-HC is specifically engineered to meet the demanding requirements of the semiconductor industry, offering superior process control, versatility, and efficiency. At the core of EATON NOVA GSD 200-HC is its ion implantation chamber, which houses sophisticated ion source technology that generates and accelerates ions to achieve precise implantation depths and energies. The system is equipped with an advanced beamline unit that controls the ion beam trajectory and intensity, ensuring uniform doping across the semiconductor substrate. The ion source features a high-current and high-energy capability, enabling the implantation of a wide range of ion species with different energies to meet diverse process requirements. The NOVAGSD 200-HC is equipped with an innovative beam monitoring and control machine that continuously monitors the ion beam characteristics in real-time. This ensures accurate and reliable ion implantation, as deviations in beam current, energy, and spot size are detected and corrected promptly to maintain process stability and consistency. The tool also features comprehensive diagnostic tools and automated calibration routines to optimize beam performance and minimize downtime. A key highlight of EATON NOVA / AXCELIS GSD 200-HC is its advanced wafer handling asset, which enables high-throughput processing of semiconductor wafers with exceptional precision and reliability. The model is capable of handling a wide range of wafer sizes and types, including silicon, gallium arsenide, and other semiconductor materials, providing manufacturers with flexibility and scalability in their production operations. The wafer handling equipment employs robotic arms and wafer mapping technology to ensure accurate positioning and alignment during implantation, contributing to high process yield and efficiency. In addition to its superior ion implantation capabilities, the NOVAAXCELIS GSD 200-HC offers a user-friendly interface and intuitive software control system for easy operation and maintenance. The unit features a comprehensive suite of process monitoring and data analysis tools that enable users to optimize process parameters, diagnose potential issues, and make informed decisions to enhance process performance and productivity. The software platform also supports remote monitoring and diagnostics, allowing for real-time process optimization and troubleshooting. Overall, EATON NOVA GSD 200-HC ion implanter and monitor represents a pinnacle of technological innovation in the semiconductor industry. With its advanced ion source technology, beam monitoring and control machine, wafer handling capabilities, and user-friendly interface, the tool offers semiconductor manufacturers a reliable and efficient solution for producing high-quality integrated circuits with precise ion implantation. The NOVAGSD 200-HC sets a new standard for ion implantation technology, empowering manufacturers to stay at the forefront of semiconductor innovation and meet the evolving demands of the industry.
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