Used EATON NOVA / AXCELIS GSD 200E #9209411 for sale
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ID: 9209411
Wafer Size: 8"
Vintage: 1995
Implanter, 8"
Upgrade kit from 80 KeV to 160 KeV
Parts included:
P/N / Description
2200109 / Hvps dual output -5kv glassman (mnl 8101410)
- / Red housing, nv-gsd-200e, rated for 160 kv operation
1204990 / Arc power supply mod nv20a
1204990 / Arc power supply mod nv20a
1204990 / Arc power supply mod nv20a
1199240 / Dis 58900 fld rpl only disk faraday assy gsd-200
17335010 / (2) Ground electrodes
17021871 / (2) Aperture vgi electron showers
3100353 / Pump turbo tmp 1000c 250 1so-k/kf40
3100353 / Pump turbo tmp 1000c 250 1so-k/kf40
- / Module controller turbo pump scu-1000c
2200114 / Hvps – 5kv 20 ma del elect
1190160 / Plasma shower gun assembly
17121720 / Graphite shield e-shower
17335030 / Ground electrode
1141471 / Faraday flag assy vitreous graphite
1181490 / Sce rgh valve v8
3500087 / O-ring -216 buna
17C5290 / Mo knob bolt
17C2983 / Set screw molybdenium
17D6405 / Cathode electrode
1766531 / Plt burn thru (vt1)
17E9560 / Feed through bracket
17E9561 / Bracket
3500496 / O-ring -208 viton
5000132 / Stdf 3/8lx3/8x6-32 rnd cer hhs
17121850 / Repeller insulator
17304680 / Shower tube aperture ii pef-xe gsdiii/led
17067300 / Cover terminal
17100170 / Corona ring
1710831 / Cover, terminal box
17071160 / Cover, terminal plate
17067720 / Cover plate, (3) screws
17081180 / Cover
17068520 / (2) Brackets, angled
17071130 / Cover, red box
17071140 / Cover, red box
17074820 / (2) Covers, flexs
17022381 / (5) Shim insul 1/16 terms nv20
17072382 / (2) Shim insul 1/32 terms nv20
E17022380 / (2) Shim insulator terminals
4001587 / (2) Knob four arms clamping 5/16-18 unc
1199850 / Terminal exh kit
17051500 / Rp1 exhaust kit
1185620 / Terminal exh kit
1837180 / Alignment tools els
1833870 / Alignment tools els
17244920 / (3) Cover lower plasmas
17249760 / (2) Cover upper plasma showers
- / Scu-1000c turbo pump controller
17D1284 / (2) Nozzle retainers
11032780 / (3) Assy src housing sprt flag shields 11b3641
17150050 / Supp rack
17063520 / (2) Supp racks
17095870 / (2) Supp racks
17120370 / Supp rack
17091650 / (3) Supp racks
TUBE / (4) Supp racks
17103190A / Fil power dist
1168893 / Electron shower iv power supply
1168200 / Source di controller
1168201 / Source di controller
17080520-A / Lead shield
1169724 / Air distr. manifold
1184260 / Filter box
17127550 / Source alignment tool
1190500 / Electromagnetic reflector assy
1745100 / Source magnet assembly
17099070 / Cover
17095340-C / Feedthrough manifold
17324630 / (2) Insulator manipulator leds
1181831 / Faraday flag assy vit gr
- / Various blank-offs plates
1181831 / Faraday flag assy vit gr
17E3662 / Front slit (w)
17S2467 / Disk
17128680 / Block
RP1 EXH / RP1 Exhaust kit
- / Accel suppression electrode
- / (3) Various graphites
- / Various graphite
- / Source main alignment fixture
- / Vra cylinder, led ultra
- / Edwards valve
- / Edwards cable
300302720 / Ckd valve
- / Edwards vacuum gauge
- / Cooling block
- / Chamber end plate
17092060A / Roof panel, 67 cm x 87 cm x 1.5 cm
17092040C / Roof panel with exhaust cutout
17092020B / Roof panel with small exhaust cutout
17092030B / Roof panel with exhaust cutout, 120.5 cm x 67cm x 1.5 cm
17092050A / Roof panel, 120.5 cm x 67 cm x1.5 cm
17092070B / Roof panel with exhaust cutout, 120.5 cm x 67cm x 1.5 cm
17092505B / Angled roof panel with exhaust cutout, 50x28, 183x120
17092XXXX / Angled roof panel with square cutout
1707075XX / Door panel, l front 175.5 cm x 97 cm x 2.7 cm
170707XXX / Door panel, l rear 175.5 cm x 97 cm x 2.7 cm
17065501G / Door panel, 175.5 x 97 x 2.5
170XXXXX / Door panel, 175.5 cm x 81 cm x 2.7 cm
170X2540B / Door panel, 175.5 cm x 81 cm x 2.7 cm
17065501G / Door panel, 175.5 cm x 97 cm x 2.7 cm
170XXXXX / Angled roof panel, 36.5 + 56 + 19 x 184 + 179.5 + 128.5 26.8 cm
170XXXXX / Angled roof panel, 50+28 183 (120)
17079780C / Extraction electrode shield, 62.5 cm 35 + 8 cm
17092600-D / Implant internal shield, 45.5 x 75.7 x 04
170XXXXX / Lead shield, 63.3 cm x 198 cm x 0.5 cm
1709XXXX / Door panel, 175.5 cm x 97 cm x 2.7 cm
17065480C / Terminal corner beam, 196.6 cm x 7.5 + 4.7 cm
170XXXXX / Terminal corner beam, 196.6 cm x 7.5 + 2.5 cm
170XXXXX / Terminal corner beam, 196.6 cm x 7.5 + 2.5 cm
170XXXXX / Terminal corner beam, 196.6 cm x 7.5 + 2.5 cm
170XXXXX / Door panel, 175.5 cm x 81 cm x 2.7 cm
170XXXXX / Door panel, 175.5 cm x 97 cm x 2.7 cm
17092540 / Door panel, 175.5 cm x 81 cm x 2.7 cm
170XXXXX / Door panel, 175.5 cm x 97 cm x 2.7 cm
17065501G / Door panel, 175.5 cm x 97 cm x 2.7 cm
1179030D / Back of terminal, 194.5 cm x 223 cm
1XXXXXXX / Front of terminal, 223 cm x 194.5 cm
1XXXXXXX / Front panel, 134 cm x 110.5 cm
170XXXXX / Earth rod
17075120X / Earth rod
1995 vintage.
EATON NOVA / AXCELIS GSD 200E Ion Implanter & Monitor is a high-powered, high-precision device designed for implanting ions into materials. The device has a wide range of options and features designed to produce perfect transistors, integrated circuits and other microelectronic components from various materials. The device comes with an array of adjustable process parameters and settings, that allow for a wide range of ion implanting recipes. It can accommodate different ion species, voltages, currents and wafer sizes, making it suitable for wide range of implant projects. AXCELIS GSD 200E Ion Implanter & Monitor is an AC-powered device and is capable of accepting up to 60kV of direct-current high voltage. It is equipped with high-speed, high-current electron guns, which enable implanting ions at a rate of up to 1,000 ions/second. It also has a cooled-water-cooled interface to avoid contamination of parts due to ion-heating. The larger EATON NOVA GSD200E supports both horizontal and vertical axis formation and simultaneous implanting of ions. This allows it to provide uniform doses and depth control, while producing the highest purity materials available. Its online monitor offers real-time monitoring of the ion implanting process, enabling the user to adjust parameters according to the desired result. Furthermore, the device is equipped with advanced analytical modules for optimizing the implanting process, by automatically recognizing errors and providing algorithms for avoiding them. The device complies with all safety standards, as it is designed to reduce the risk of harm to personnel and equipment. As the device is controlled from a PC, it can be remotely operated from anywhere in the world. Finally, GSD200E Ion Implanter & Monitor has a wide range of features that make it a premier product in its class. Its advanced system is able to quickly and accurately implant ions in a wide range of materials, and its real-time monitoring system gives the user full control over its operation. Its combination of accuracy, precision, and safety makes it a top choice for ion implanting operations.
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