Used EATON NOVA / AXCELIS GSD 200E2 #293721217 for sale
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EATON NOVA / AXCELIS GSD 200E2 is an ion implanter and monitor developed by AXCELIS, a division of EATON NOVA Technologies, Inc. It offers superior performance, reliability, and versatility for ion implantation processes. AXCELIS GSD 200E-2 offers a wide range of implant depths and diameters, up to 8 kV and 3.0 T/m respectively. It incorporates a closed beamline design, and is equipped with source and beamline gas systems. The gas systems, regulated from outside the beamline, provide optimal particle energy, working pressure, angular shapes, and position of the filament. EATON NOVA GSD 200 E2 is equipped with a state-of-the-art control system for both manual and automated operation. From the touch panel display, the user can control the chamber pressure, filaments, and the settings. It also has a built-in diagnostics feature that enables the operator to monitor the system in real time and remotely, including the temperature, voltage, and gas levels. EATON NOVA / AXCELIS GSD 200E-2 is built with a removable mechanical shutter, which provides additional safety and accuracy. In terms of safety and other performance features, AXCELIS GSD 200 E2 is equipped with an acoustic enclosure, as well as radiation and vacuum enclosures that meet the safety requirements of semiconductor processing. AXCELIS GSD 200E2 is the only ion implanter and monitor that is capable of providing fast and precise readings in the high performance implanter service market. Not only does GSD 200E2 provide precise implantations, it also monitors and controls the environment throughout the process. It is able to detect and respond to particle trajectories, beam profile, and statistical parameters. With advanced sensors and software design, the system is able to ensure precise implantation performance and less particle damage. In addition, EATON NOVA / AXCELIS GSD 200 E2 allows for tight implantation ofsmall particles. This is essential for tech processes, like MEMS and other micro-device fabrication. EATON NOVA GSD 200E-2 also features a broad range of particle types and sizes, as well as high speed switching between different ion species. With high accuracy and minimal degradation, GSD 200E-2 is the highest performance ion implanter and monitor in the market.
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