Used EATON NOVA / AXCELIS GSD-HE #9262470 for sale

EATON NOVA / AXCELIS GSD-HE is an ion implanter & monitor that is used for the implantation/sputtering of ionizing particles into substrates for various applications such as semiconductor, MEMS, and other electronic device manufacturing. It combines the best features of both Eaton and AXCELIS in a versatile and efficient unit. AXCELIS GSD HE utilizes electromagnetic lenses to accurately deliver ionizing particles to the substrate. This allows the unit to accurately deliver ions while also controlling their energy level. It also uses a 6-level high-voltage feed to configure and control the ion dosage to the specific application requirements. The unit is designed with a joystick controller & 3-level display equipment to easily control the implant and monitor parameters. EATON NOVA GSD / HE offers a number of features to ensure optimal performance such as a temperature-controlled vacuum system for optimal temperature stability, an angle of incidence (AOI) unit for fine tune angle adjustments, and a range of ion source configurations to choose from depending on the application. Other features include an ion current monitor, an ion energy monitor, a substrate-temperature monitor, an oxygen sensor and a beam position alignment machine. In addition, EATON NOVA / AXCELIS GSD / HE is designed with a sophisticated plasma control tool for maximum implant uniformity and reproducibility. It also features a gas injection asset to achieve optimum vacuum conditions, as well as a multi-channel signal processor to monitor a variety of parameters and optimize process efficiency. To ensure a continuous and consistent process EATON NOVA GSD HE comes equipped with a number of circuits, including a computerized data acquisition model, a power supply, a power monitor and a pulse-height analyzer which can detect particle velocity and energy information. Overall, EATON NOVA GSD-HE is a reliable and versatile unit that delivers precision and accuracy in implantation/sputtering. It is an ideal choice for applications ranging from semiconductor manufacturing to MEMS to other electronic device manufacturing. With its powerful features, GSD-HE enables improved productivity, efficiency, and uniformity of product.