Used EATON NOVA / AXCELIS GSD UHD #9094928 for sale

EATON NOVA / AXCELIS GSD UHD is an ultrahigh dose ion implanter/monitor developed by Eaton Corp. AXCELIS GSD UHD is built on Eaton's innovative and proven High Current Source technology, offering the industry's highest maximum ion beam current and dose production rate. EATON NOVA GSD UHD features both an ion implanter and monitor, providing cost-effective solutions to both low energy and high energy implants. GSD UHD can precisely control the dose, current, and beam profiles of high energy ion implanting. This allows users to precisely customize ion implanting processes to meet the exacting requirements of current device technology. EATON NOVA / AXCELIS GSD UHD monitor continuously monitors implantation conditions with a highly precise ion beam current reading, as well as its position. Combined, AXCELIS GSD UHD implanter and monitor system provides users the best possible accuracy and control of implantation parameters. EATON NOVA GSD UHD ion implanter is equipped with a revolutionary high current source, providing a beam current capability of up to 1mA at ion energies up to 3keV and greater. This allows for precise and accurate processing of a variety of substrates and devices with the highest levels of precision and repeatability. GSD UHD implanter also has a wide range of gas and end station options, allowing users to electron beam heat treat, mix nitride and oxide film stacks, and anneal the substrate. EATON NOVA / AXCELIS GSD UHD monitor provides users with real-time access to critical processing parameters with its built-in high-resolution multi-channel signal processor. This allows users to precisely control beam currents, beam profile, and beam energy during implantation. It also provides users with important information, such as dose uniformity, total dose delivered, and ion current, for post analysis of implant parameters. AXCELIS GSD UHD ion implanter and monitor system provides users with the most reliable and precise ion implantation performance on the market, offering a cost effective solution for today's most advanced processing requirements. With its robust feature set, EATON NOVA GSD UHD represents the very best of inan implanter and monitor systems.