Used EATON NOVA / AXCELIS NV 10-160 #9199861 for sale

EATON NOVA / AXCELIS NV 10-160 is a High Voltage Implanter and Monitor designed to handle modern ion implantation requirements. The equipment is capable of operating at up to 10 kV and has a current range of up to 160 mA. It has a built-in digital display that can be used to monitor and control parameters such as dose, current, voltage, and time. AXCELIS NV10-160 features an intuitive touch screen interface. This interface allows users to easily set up, monitor and adjust system parameters using simple menus. It also allows for data collection, monitoring and recording of implant runs, with the ability to quickly recall previous parameters for simple setup and repeatability. Additionally, the interface can be customized for specific applications or process recipes. EATON NOVA NV 10160 also includes a multi-energy implant source, allowing for multiple energy levels in a single voltage cycle. This allows for higher quality implanting with less energy fluctuation. The unit also offers a wide range of energy spread and Targeted Implant profiles for improved control, repeatability and accuracy. AXCELIS NV 10-160 is capable of supporting a wide range of wafers, substrates and dies. This allows for the implantation of a range of components, including memory chips, logic ICs, MEMS, MEMS-RF components and other gate structures. The machine offers a range of masks and collimators which can be used to focus the ion flow, providing a higher degree of accuracy over uniform implanting. In addition to its incredibly flexible application possibilities, NV10-160 also features a low-temperature operation and low beam current capability. This allows for more demanding, ultra-precision implants, while at the same time reduces drift and thermal stress effects on the substrate. Additionally, the tool utilizes advanced safety features and automated alarms in order to monitor and protect the integrity of the implant process. Overall, EATON NOVA / AXCELIS NV10-160 is a commercial grade, top-of-the-line ion implanter & monitor for ultra precision and flexibility. Its intuitive touch-screen interface, multi-energy implant source, accuracy, low-temperature operation, and safety measures make it an ideal choice for any implanting from memory chips to MEMS-RF components.