Used EATON NOVA / AXCELIS NV 10-80 #9183991 for sale
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ID: 9183991
High current ion implanter
Standard beam controller
Kaiser HVPS
Bernas ion source
With AT4 autoloader (*non-functional)
Includes data flow option
SDS and high pressure (SDS B11 and PH3)
High pressure Ar
6” Clampless (150 mm Set up)
Vac exchange arm
(2) Disks
80 KeV Max
Kaiser high voltage power supply
Vaporizer: Yes
Cryo pumps: (2) CTI 8 standard + compressors
(4) Gas high pressures
Disk exchange arm type: Vacuum
Analyzer power supply: EMI Type
Pumps: (2) LEYBOLD D40 B (RP3, 4)
Electronics (CPU Software / PCB Type):
Vac controller: VAC 733 (101 MB)
Dose controller: 796 Rev. E (101 MB)
AMU Controller: AMU618 C (101 MB).
EATON NOVA / AXCELIS NV 10-80 is an ion implanter & monitor that is designed to provide reliable and accurate pulsed ion implantation. It has a patented, optimized beamline design with automation and precision control. The equipment has an advanced beam control module and process control software that enable the efficient gas flow control, displacement control and beam current regulation for different process conditions. The system also has a compact, space saving design, allowing out of the box installation and set up. AXCELIS NV 10-80 delivers superior ion implantation performance due its superior beam characteristics, such as pulse rate, pulse shape, pulse duration and pulse current. It has a very high implantation efficiency, which can reduce the amount of non-implanted ions in the wafer and thus, increase yield and reduce cost. The unit also has proprietary real-time implanters self-diagnostics feature which can detect beam irregularities before or during implantation. EATON NOVA NV 1080 comes with fully integrated monitoring, measurement and control capabilities. The machine's monitor panel shows all the important info, including rate, pressure, dose, current, and implant location. The tool also features automated chamber, beam and wafer scanning capabilities, as well as wafer rotation, focusing and alignment functions. This allows the users to precisely control the implantation dose and optimize beam parameters. NV 10-80 is simple and flexible to use, and it can be used by operators who have a wide range of experience levels. It is a cost-effective solution for production, with a high level of process controllability, productivity and yield for medium to large volume applications. The asset is also easy to maintain and can provide long-term reliability. AXCELIS NV 1080 is designed to meet the highest safety, and quality standards, and can maintain high performance over extended periods of time. It is HAS Compliant and is designed to meet the toughest industry standard when it comes to quality, safety, and reliability.
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