Used EATON NOVA / AXCELIS NV 10 #9036797 for sale

EATON NOVA / AXCELIS NV 10 is a high-performance ion implanter and monitor for semiconductor device fabrication. It is an advanced, analytical platform designed to accurately monitor process parameters and implant individual ions with extremely high precision. The state-of-the-art, built-in control features allow operators to quickly set up and maintain a consistent implanting process. In addition, it can be used to perform on-the-fly analysis of the implanted ions, frequencies, concentrations and distributions. The key components of AXCELIS NV 10 include a precisely-controlled, high-precision, three-axis linear motor platform that moves the implant head, allowing for ultra-high accuracy and resolution. It is equipped with an active analysis chamber to measure ion implantation rates, beam spot size, ion mass and energy for validation of process results. Its feed-back equipment helps keep the implanting process constant over a wide range of conditions. EATON NOVA NV 10 also incorporates a range of advanced features to monitor and record changes in the relative position of the implant head with respect to the sample. This allows users to optimize precision accuracy and reproducibility. It also includes an ion measurement system that provides real-time measurements of the ions implanting rate, beam spot size, ion mass and energy. NV 10 has an automated wafer handling unit allowing fast and efficient implanting of multiple wafers to enhance throughput. The automated machine supports up to four wafer cassettes and is capable of changing implant samples quickly or during operation, without interrupting the process. Overall, EATON NOVA / AXCELIS NV 10 is an extremely powerful and accurate ion implanter and monitor. It is designed for challenging processes requiring steady and precise control of the implanting tool and process parameters. The asset is easy to use and provides excellent accuracy and stability of the implanting process, allowing it to be used for a variety of applications.