Used EATON NOVA / AXCELIS NV 6200A #9270103 for sale

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ID: 9270103
Wafer Size: 5"
Implanter, 5" Can be convertible to 6".
EATON NOVA / AXCELIS NV 6200A is a high-performance ion implanter and monitor designed to provide reliable and repeatable implantation processes and routine monitoring of beam performance. This machine combines robust and scalable architecture with innovative software and hardware that optimizes beam current delivery, providing higher levels of accuracy, efficiency, and reliability. AXCELIS NV 6200A is capable of implanting a wide range of features from the tiniest to the largest. It has an operating voltage of 30kV to 40kV and various operating parameters such as current, dose, and angle of implant that can be set by the user. It is capable of delivering up to 1,200 amperes of beam current with an accuracy of 0.5%, and a duty cycle capability of greater than 99%. EATON NOVA NV-6200A has a digital ion beam controller that enables precise and repeatable control of implanted ions. It has an integrated imaging equipment that allows users to adjust the focussing of the beam and to monitor implanted objects in real-time. The monitor has an advanced software suite that allows users to monitor the performance of the beam in real-time and record the data in a more organized and consistent manner. The machine also comes with an automated end-point control system that monitors the beam current and adjusted it automatically based on user defined parameters. The end-point control unit also intelligently optimizes beam current and beam shape to ensure that a pre-defined end-point target is achieved. NV-6200A also features an integrated temperature control machine that calms and maintains the temperature of the gas in the load lock chamber. This helps to minimize objet distortion during implantation and ensure stable implantation processes. EATON NOVA / AXCELIS NV-6200A comes with a complete inventory of spare parts and a wide range of service options that enable users to maximize the life of the tool. This ranges from preventive maintenance services to oven relinings to prevent the buildup of dust and debris. Finally, EATON NOVA NV 6200A is designed for the utmost safety. It is enclosed in a stainless steel housing and is equipped with an advanced safety asset that prevents any potential accidents. It also features motion sensors that alert the operator when the beam is moving, and laser-assisted safety lockouts to prevent unauthorized access.
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