Used EATON NOVA / AXCELIS NV 8250 #293595700 for sale
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EATON NOVA / AXCELIS NV 8250 is an ion implanter and monitor equipment used for semiconductor and thin film processing. The system consists of an ion gun and an electron monitor. The ion gun produces an ion beam, usually of boron or phosphorous, which is used to deposit dopants into the thin films, while the electron monitor measures the current of the resultant beam. The unit has a wide operational voltage range of 6 to 12 keV and can be operated in either continuous or pulsed operation. It is equipped with a deflector that controls the angle and width of the beam, as well as a Faraday generator that measures the Faraday current of the beam to determine the dopant concentration of the thin films. Additionally, the machine is highly fault-tolerant and incorporates self-diagnostics to detect any malfunction, allowing for quick and easy maintenance. The tool utilizes a variety of thin films (ZnS, TiN, SiC, etc.). The source material, typically a wafer, is placed in the source holder, and can be adjusted for size, thickness and tilt. The beam parameters such as beam spot size, current and energy can be adjusted, and the beam can be deflected to different angles to provide uniform coverage of the wafer surface. The ion beams are guided through an array of electrostatic lenses, enabling the beam spot size to be finely adjusted. The asset is also equipped with a number of safety features that protect both the operator and the equipment. The model includes an emergency flushing equipment that automatically shuts off the power when an abnormality is detected. Additionally, the source holder is surrounded by a shielded box, reducing the exposure of the operator to any dangerous radiation. AXCELIS NV 8250 is a highly advanced ion implanter and monitor system, allowing for precise and reliable dopant deposition on thin films for semiconductor and thin film processing. With its highly adjustable parameters and range of safety features, the unit can help operators achieve consistent and reliable results.
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