Used EATON NOVA / AXCELIS NV GSD 200 #293745414 for sale
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EATON NOVA / AXCELIS NV GSD 200 is an ion implanter and monitor designed for high performance chip fabrication and testing. The device enables users to implant ions into their semiconductor substrates with higher levels of accuracy and production control. It is composed of two main modules - the ion implanter and the monitor. The ejector system within the implant module is capable of producing low PDS and TPH implants on different work pieces during an implant cycle. The device contains several independent power supplies to increase plasmatic stability, improve process control and reduce variation. Additionally, it features an integrated controller with several dedicated hardware interfaces for improved performance and control. This improves reliability and allows for more efficient data acquisition. The monitor module of the machine is capable of displaying real time parameters to enable process control. It includes a control system with open and closed loop operations, allowing operators to change injection parameters on the fly. Additionally, the device is equipped with a resistivity monitor linked to both the implant and monitor modules to measure and analyze the change in resistivity over time. This helps to identify and analyze any abnormalities in the implantation process. The device is also equipped with an in-built vacuum system, as well as a large vacuum chamber to minimize contaminants and maximize air circulation. This ensures optimal implantation quality and enhances production-level reliability. Furthermore, the device is protected from environmental fluctuations during operation, reducing chances of errors and improving productivity. AXCELIS NV GSD 200 is a versatile and reliable ion implanter, making it an ideal choice for chip fabrication and testing.
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