Used EATON NOVA / AXCELIS NV GSD 200E2 #9268106 for sale
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ID: 9268106
Wafer Size: 5"
Vintage: 2001
High current ion implanter, 5"
2001 vintage.
EATON NOVA / AXCELIS NV GSD 200E2 is a state-of-the-art ion implanter and monitor that allows for precise control of micro-level ionic processes. This equipment is designed for the ultra-high precision implants needed for applications in semiconductor manufacturing, biomedical device fabrication, and high-end exposure technologies. The GSD 200E2 employs an advanced high-efficiency cavity ion optics and a high-pressure ion source that allows for a finely controlled and rapid pulse operation as well as high throughput. This equipment also includes an advanced integrated monitor system to track the ion pulse characteristics over the course of the implant. The unit's closed loop feedback allows for dynamic control of the implant, enabling highly accurate and repeatable implants. In addition, the monitor is capable of computing and logging the concentration of particles implanted, with sub-nanometer accuracy. The NOVAAXCELIS GSD 200E2 operates using an optimized cooling machine to ensure steady and consistent implants. This cooling tool also helps reduce heating and particle build up across the chamber, ensuring that the desired results are achieved with each implantation. The asset is also equipped with additional features designed to increase safety during implantation, including a fully automatic chamber cleaning model and high-speed measurement capabilities. The equipment also features a high-precision analytical system that provides data on a variety of parameters. This includes ions kinetic energy, as well as energy profile data and real-time analysis. The data collected by this unit can be used to aid with process development and provide feedback on the success of each implant. Overall, AXCELIS NV GSD-200E2 is designed to provide the most precise control over the ion implantation process. This ion implanter and monitor comes equipped with the latest technologies, integrated monitoring, and high-precision analytics, making it an ideal solution for applications where precise control is required.
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