Used EATON NOVA / AXCELIS NV GSD-HE #293615032 for sale
ID#: 293615032
Ion implanter, 8"
Source module:
Gas box:
Gas line-1: HP(Ar), Tylan
Gas line-2: HP (BF3)
Gas line-3: MKS, SDS, PH3
Gas line-4: MKS, SDS, ASH3
Isolation transformer: Oil type
Injector module:
Source type: ELS / Non-vaporizer
Extraction electrode type: 3-Axis electrode
BOC EDWARDS STP-2000C
EBARA 40X20 Dry pump
Facilities module:
Machine transformer: Dry type
Triple loops chiller
AFFINITY CWA-300L-VHE-3LP, P/N:10185
AFFINITY RWA-012T-BE03CB Disk chiller
(2) CTI Cryogenic 9600 compressors
Linac module:
Injector faraday
(2) LEYBOLD Turbovac 1000C Turbo pumps
EBARA 40X20 Dry pump
(4) RFG-3000
(
Manufacturer:
EATON NOVA / AXCELISModel:
NV GSD-HECategory:
ION IMPLANTERS & MONITORSWafer Size:
8"Equipment Details:
Source module:
Gas box:
Gas line-1: HP(Ar), Tylan
Gas line-2: HP (BF3)
Gas line-3: MKS, SDS, PH3
Gas line-4: MKS, SDS, ASH3
Isolation transformer: Oil type
Injector module:
Source type: ELS / Non-vaporizer
Extraction electrode type: 3-Axis electrode
BOC EDWARDS STP-2000C
EBARA 40X20 Dry pump
Facilities module:
Machine transformer: Dry type
Triple loops chiller
AFFINITY CWA-300L-VHE-3LP, P/N:10185
AFFINITY RWA-012T-BE03CB Disk chiller
(2) CTI Cryogenic 9600 compressors
Linac module:
Injector faraday
(2) LEYBOLD Turbovac 1000C Turbo pumps
EBARA 40X20 Dry pump
(4) RFG-3000
(
