Used EATON NOVA / AXCELIS NV GSD-HE #293615032 for sale

Name: EATON NOVA / AXCELIS NV GSD-HE
Brand: EATON NOVA / AXCELIS
SKU: 293615032
Availability: SoldOut

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Ion Implanters & Monitors

Manufacturer

EATON NOVA / AXCELIS

Model

NV GSD-HE

ID: 293615032

Wafer Size: 8"

Ion implanter, 8" Source module: Gas box: Gas line-1: HP(Ar), Tylan Gas line-2: HP (BF3) Gas line-3: MKS, SDS, PH3 Gas line-4: MKS, SDS, ASH3 Isolation transformer: Oil type Injector module: Source type: ELS / Non-vaporizer Extraction electrode type: 3-Axis electrode BOC EDWARDS STP-2000C EBARA 40X20 Dry pump Facilities module: Machine transformer: Dry type Triple loops chiller AFFINITY CWA-300L-VHE-3LP, P/N:10185 AFFINITY RWA-012T-BE03CB Disk chiller (2) CTI Cryogenic 9600 compressors Linac module: Injector faraday (2) LEYBOLD Turbovac 1000C Turbo pumps EBARA 40X20 Dry pump (4) RFG-3000 (6) RFG-3001 FEM Module: FEM Power: EMS:03-165-2-D, P/N:00473110 EMS: 03-165-2-D, P/N:00473110 FEM Guss: P/N:1182890 Endstation Module: 307 Type controller Ion gauge type: Tube glass 4-Axis In-Air controller 4-Axis Robot controller (Macobot controller) 4-Axis Y-Scan controller 4-Axis Cyro controller Universal dose controller Disk module: CTI-CRYOGENIC OB-8 CTI-CRYOGENIC OB-10 CTI-CRYOGENIC OB-250F EBARA 40X20 Dry pump Flag faraday In-Vac arm Wafer holder Gyro Linear drive Disk faraday Resolver faraday Disk model: Si coating Rotary motor type: Belt drive Vacuum cassette elevator type: GRTV Notch finder Dummy cassette Load buffer E/S Elec rack / Quad console module: Quad rack module Quadruple power supply (5) Quadruple power supplies E/S Elec rack module:1178580 Cell controller model: 133, P/N:1191297 Ground DI DI Power conditioner Gyro controller Loadlock controller DEXON / PN:19077660 / Flow hood.

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EATON NOVA / AXCELIS NV GSD-HE is a state of the art Ion Implanter and Monitor designed for ion beam implantation applications. The equipment is designed for use in semiconductor manufacturing processes, and is capable of implanting high-quality ions with ultra-accurate and reliable results. The system utilizes a high-energy, high-voltage ion source and a range of advanced features to provide implantation of small, well-defined ion doses accurately and reliably. The ion source of the GSD-HE unit is a highly reliable, high-energy, high-voltage ion source with a triple-axis magnet configuration. This ion source is capable of producing pulse ion beams of up to 2.1 MeV and a continuous beam of up to 2.3 MeV and is capable of producing the highest quality of ion implantation available. The ion source is highly configurable, and is capable of achieving various levels of implantation depth, angle, and energy through user input settings. The GSD-HE also uses a range of advanced features to ensure accurate and reliable results. The machine is equipped with a comprehensive monitoring tool for the ion beam, which allows for real-time monitoring of all the critical parameters such as beam intensity, beam shape, energy level, and the number of ions implanted. This enables the user to obtain the most accurate and reliable results. The asset also has a variety of alarms and safety systems to keep the model running safely, as well as an automated switching feature to provide automatic switching between implantation and monitoring settings. In addition to all these features, the GSD-HE equipment also offers a range of advanced features to increase the speed, accuracy, and reliability of any implantation process. This includes an adaptive scanning system that allows for faster, more efficient implantation, as well as the ability to program the unit to perform multiple implants in a single cycle. The GSD-HE also has a range of high-performance control and diagnostic tools to ensure reliable results, such as a FAT sampling tool that samples future scans to verify the accuracy of the implantation and a built-in Calibration Mode to ensure accuracy and repeatability of implantations. The GSD-HE is a reliable, high-performance machine that offers the user a wide range of advanced features to optimize their implantation process. Its variety of monitoring and control systems make it an ideal choice for both experienced and inexperienced users. Combined with its state-of-the-art components, the GSD-HE is the perfect choice for high-quality, reliable implantation results.