Used EATON NOVA / AXCELIS NV GSD-HE #9195914 for sale
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ID: 9195914
Wafer Size: 8"
Ion implanter, 8"
SUMITOMO EATON NOVA End station
Source / Injector region: ELS
Electrode assembly: SEN
Gas channels: Ar, BF3, PH3, AsH3
High pressure gas
Injector PD / DI
S.Control DI
Filament PS
Cathode PS(ELS)
Arc PS
Extraction HVPS
Suppression PS
Vac gauge controller
Analyzer magnet PS
Source magnet PS
Injector electronic DI
Gauss controller
S.Turbo/Controller
S.Gas control DI
Beam guide assy
Source gate valve
High voltage stack
Hall probe
Injector beamline DI
Injector Faraday
RP1 Pump
Isolation tank
Vaporizer: No
Analyzer turbo/Cont: No
Linac region:
AC PD Box
RF PS
Resonator can
Pneumatic control box (1&2)
Turbo pump: STP-H600C
Control: Yes
Cooling tube
RF Generator
FEM Control DI
Quad PS
Vacuum controller
Roughing pump (RP4)
Gauss meter / Probe: 1157450 / AXCELIS
Magnet DI
Wire harness
Quad assembly
Resolving housing region:
Electron shower assy
Gyro control DI
In-Air control DI
Loadlock control DI
Electron shower PS
Robot control DI
Cryo pump (P2,3,9)
Wire harness
Cell controller
Flag Faraday
Cryo compressor
Roughing pump (RP2)
Data link hub
Cryo on-board DI: No
End station region:
Rotary drive motor
(4) Cassette tables
Disk W/spare
Rotary drive DI
Y-scan control DI
HCIG Controller
Cassette door
Disk TC control DI
In-Air robot W/chuck
Dose control DI
Flat aligner
Dummy buffer
Vacuum cassette
Resister box
Cassette stand
Load buffer
In-Vac arm
Laminar flow hood
Clamp
Wafer holder
Sun workstation
Disk removal tool: No
Ground region:
Main PD DI
Triple loop chiller
UWX30
Oscilloscope
Smoke detector
Power cable: No
Work table: No
Sun workstation: No
(2) Laminar flow hoods
Outer door
Panels:
Loop panel
Outer enclosure panel
Lead panel
Endstation glass panel
Floor
Manual / Drawing:
Operation manual
Maintenance manual
Endstation align manual
Calibration manual
Original vendor manual
System drawing.
EATON NOVA / AXCELIS NV GSD-HE is a high-performance ion implanter and monitor. The implanter utilizes the latest technology in implant technology, providing users with outstanding performance and control when implanting ions. The GSD-HE also features a high-precision monitoring equipment to ensure accuracy and safety. At the heart of AXCELIS NV GSD HE lies its implementation system. This unit uses a high-efficiency ion source that is capable of accelerating ions to energies of up to 500 keV. This energy is sufficient to implant ions deep into the surface of a wide variety of materials. The ion implanter also features several different lenses to ensure precise and uniform implantation. Additionally, the GSD-HE is equipped with an adjustable shutter that allows users to precisely control the amount of ions released. The GSD-HE also features a number of monitoring systems. These systems are designed to detect any deviations in the machine's performance and provide accurate readings of implantation parameters such as ion current, beam instability, contamination, and other variables. The monitor also records these values in a real-time log that can be viewed or downloaded for future reference. EATON NOVA NV-GSD HE is also capable of performing a variety of other operations as well. For instance, the implanter can be programmed to reject particles that have certain characteristics, allowing for enrichment of desired target particles. It also has the capability to vary the energy and implant rate, allowing users to customize the implanter to meet their specific application requirements. Moreover, the GSD-HE can be used for different types of plasma processing, such as PECVD, PACVD, and metalorganic chemical vapor deposition (MOCVD). The GSD-HE is also equipped with a variety of safety features. It monitors the implanter's performance via an array of sensors that detect any abnormal operation. The tool also features an emergency stop button that can be used to quickly shut down the asset in the case of emergency. In conclusion, EATON NOVA NV GSD / HE is an advanced, highly reliable, and versatile ion implanter and monitor. The GSD-HE offers users exceptional performance, precision, and safety features, making it the perfect choice for a variety of applications.
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