Used EATON NOVA / AXCELIS NV GSDIII #293762494 for sale

The Eaton/NovaEATON NOVA / AXCELIS NV GSDIII ion implanter and monitor is a powerful and versatile implantation equipment used in the fabrication of advanced device technologies. The system is designed to offer extremely accurate and repeatable implantation of both dopants and dopant species, as well as precise monitoring of the implanted species. The GSDIII is a four-axis unit that allows for full computer control of the implantation parameters, including the beam energy, dosage, and shape on the target. The machine makes use of an ultra-low-vacuum chamber with a full-field ion implanter that produces very low doses of the species while still maintaining the desired implantation profiles. The chamber is heated to help stabilize the environment, and there is an additional gas manifold to provide accurate and stable gas flow for further controlling the implantation environment. In addition, a wide variety of substrate handling configurations and stages are available, allowing for implantation of a wide variety of substrates. The GSDIII is designed with a modern digital interface that allows for easy set-up and control of the implantation process. This includes intuitive graphical display of implantation profiles, as well as detailed logging of the data and automatic archiving of the profiles for easy access later on. The tool provides precise feedback of the implanted species by monitoring the energy, dosage, and shape of the beam while in the implantation chamber. By using the sensor feedback from the monitor, the operator can ensure that the implantation is proceeding as desired and can readjust parameters if necessary. The comprehensive control available from the GSDIII asset, combined with its efficient and powerful design, makes it an optimal choice for implantation of a variety of implant activities. The model is highly reliable and easily serviceable, ensuring maximum infiltration efficiency. The robust design and user-friendly interface make the equipment a reliable, truly advanced implant technology solution.