Used EATON NOVA / AXCELIS Optima HD #293760169 for sale

EATON NOVA / AXCELIS Optima HD Ion Implanter & Monitor is a high-end implantation and monitoring equipment designed for use in the semiconductor industry. It is suitable for medium- and high-dose production applications, and offers high throughput and high-resolution dose heterogeneities. The NovaAXCELIS Optima HD system is equipped with a high voltage power supply, as well as a highly optimized beam control logic and a multi-stage beam scroll device. This allows for precise and non-oscillating channeling of the ion beam in an X-Y plane, as well as a Z-axis for enabling dose uniformity. The unit also features an extended control risk assessment and defect-free implantation capability, providing high process reliability. Additionally, the NovaEATON NOVA Optima HD machine provides enhanced implant capability, enabling a broad range of dose depths with high-end accuracy. The NovaOptima HD tool also includes a monitor asset, which includes several features that enhance monitoring accuracy. These include a real-time, fully automated beam profile monitor, an automated beam profile monitor with multiple grids, and a steady-state current monitor. Additionally, a host of monitors, such as beam self-diagnostics and vacuum leak monitoring, are integrated into the model. Other features of the NovaEATON NOVA / AXCELIS Optima HD equipment include a beam unloading system to assist in the loading and unloading of the implantation chambers. The unit also offers a robust grounding machine, high voltage shutoff protection devices, integrated safety interlock monitoring, and an integrated particle detector. In conclusion, AXCELIS Optima HD Ion Implanter & Monitor is a powerful and reliable implant tool, offering a wide range of features to ensure quality implants and high throughput production. The included monitor asset and additional features provide further assurance of accuracy and reliability, all while being cost effective and keeping in line with semiconductor industry standards.